Multi-charged particle beam writing apparatus, and multi-charged particle beam writing method

ABSTRACT

A multi-charged particle beam writing apparatus according to one aspect of the present invention includes a region setting unit configured to set, as an irradiation region for a beam array to be used, the region of the central portion of an irradiation region for all of multiple beams of charged particle beams implemented to be emittable by a multiple beam irradiation mechanism, and a writing mechanism, including the multiple beam irradiation mechanism, configured to write a pattern on a target object with the beam array in the region of the central portion having been set in the multiple beams implemented.

CROSS-REFERENCE TO RELATED APPLICATION

This application is a division of and claims benefit under 35 U.S.C. §120 to U.S. application Ser. No. 16/654,155, filed Oct. 16, 2019, whichis based upon and claims the benefit of priority under 35 U.S.C. § 119to Japanese Patent Application No. 2018-204059 filed on Oct. 30, 2018 inJapan, the entire contents of which are incorporated herein byreference.

BACKGROUND OF THE INVENTION Field of the Invention

Embodiments of the present invention relate to a multi-charged particlebeam writing apparatus and a multi-charged particle beam writing method,and, for example, relate to a beam irradiation method in multi-beamwriting.

Description of Related Art

The lithography technique which advances miniaturization ofsemiconductor devices is extremely important as a unique process wherebypatterns are formed in semiconductor manufacturing. In recent years,with high integration of LSI, the line width (critical dimension)required for semiconductor device circuits is becoming increasinglynarrower year by year. The electron beam writing technique, whichintrinsically has excellent resolution, is used for writing or “drawing”patterns on a wafer and the like with electron beams.

For example, as a known example of employing the electron beam writingtechnique, there is a writing apparatus using multiple beams. Since itis possible for multi-beam writing to apply multiple beams at a time,the writing throughput can be greatly increased in comparison withsingle electron beam writing. For example, a writing apparatus employingthe multi-beam system forms multiple beams by letting portions of anelectron beam emitted from an electron gun individually pass through acorresponding one of a plurality of holes in a mask, performs blankingcontrol for each beam, reduces each unblocked beam by an optical system,and deflects it by a deflector to irradiate a desired position on atarget object or “sample”.

In multi-beam writing, the dose of each beam is individually controlledbased on the irradiation time The control circuit which performs such anindividual control is included in a blanking aperture array apparatusmounted in the body of the writing apparatus. In multi-beam writing, forfurther improving the throughput, it is assumed to be necessary toincrease the current density so as to reduce the irradiation time ofeach beam. However, when the total current amount of multiple beamsapplied by simultaneous irradiation increases, there is a problem thatso-called blurring and/or positional deviation of an image of themultiple beams occurs due to the Coulomb effect, thereby degrading thewriting accuracy.

Thus, there is a trade-off relation between the throughput and thewriting accuracy. In the writing apparatus, processing for increasingthe throughput, required even at the cost of the writing accuracy, andprocessing for increasing the writing accuracy, required even at thecost of the throughput, are intermingled.

Here, a method is proposed that groups the beam arrays, and shifts thebeam irradiation timing of each group while collectively transmittingexposure time control signals for the whole beam arrays to a blankingaperture array apparatus including a control circuit to control the doseof an individual, beam (e.g., refer to Japanese Patent ApplicationLaid-open (JP-A) No. 2017-191900). According to this method, since thetransmission time is not long, it is possible to suppress the currentamount per shot while reducing the decrease of the throughput. However,with the recent tendency to form micropatterns, it is required todevelop a method for higher writing accuracy than the accuracy currentlyobtained.

BRIEF SUMMARY OF THE INVENTION

According to one aspect of the present invention, a multi-chargedparticle beam writing apparatus includes

a region setting circuit configured to set, as an irradiation region fora beam array to be used, a region of a central portion of an irradiationregion for all of multiple beams of charged particle beams implementedto be emittable by a multiple beam irradiation mechanism; and

a writing mechanism that includes the multiple beam irradiationmechanism, configured to write a pattern on a target object with thebeam array in the region of the central portion having been set in themultiple beams implemented.

According to another aspect of the present invention, a multi-chargedparticle beam writing apparatus includes a shot data generation circuit,provided relating to a first beam array of charged particle beamsimplemented to be emittable by a multiple beam irradiation mechanism,configured to generate shot data for a second beam array whose number ofbeams is smaller than that of the first beam array implemented;

a transfer circuit configured to transfer, in order of shot, the shotdata for the second beam array whose number of beams is smaller thanthat of the first beam array implemented;

a plurality of registers, each arranged for a corresponding beam of thefirst beam array, each configured to store shot data of thecorresponding beam; and

a writing mechanism that includes the multiple beam irradiationmechanism, configured to write a pattern on a target object byperforming shots of the second beam array,

wherein each register of registers, in the plurality of registers, forthe second beam array stores shot data for an n-th shot of the secondbeam array, and simultaneously, each register of registers, in theplurality of registers, for a third beam array, which is other than thesecond beam array in the first beam array, stores at least a part ofshot data for an (n+1)th shot of the second beam array, and in a case ofthe n-th shot having been completed, the shot data for the (n+1)th shotis shifted at least from the each register for the third beam array tothe each register for the second beam array.

According to yet another aspect of the present invention, amulti-charged particle beam writing apparatus includes

a region dividing circuit configured to divide an irradiation region forall of multiple beams of charged particle beams implemented to beemittable by a multiple beam irradiation mechanism into a plurality ofregions;

a lens control circuit configured to change a lens control value of anelectromagnetic lens for refracting the multiple beams, based on anumber of beams in a divided region of the plurality of regions; and

a writing mechanism that includes the multiple beam irradiationmechanism and the electromagnetic lens, configured to write a pattern ona target object by performing irradiation with a beam array in a dividedregion, using the electromagnetic lens whose lens control value has beenchanged based on the number of beams, while shifting an irradiationtiming for each divided region.

According to yet another aspect of the present invention, amulti-charged particle beam writing method includes

setting, as an irradiation region of a beam array to be used, a regionof a central portion of an irradiation region of all of multiple beamsof charged particle beams implemented to be emittable by a multiple beamirradiation mechanism; and

writing a pattern on a target object with the beam array in the regionof the central portion having been set in the multiple beamsimplemented.

According to yet another aspect of the present invention, amulti-charged particle beam writing method include

generating, relating to a first beam array of charged particle beamsimplemented to be emittable by a multiple beam irradiation mechanism,shot data for a second beam array whose number of beams is smaller thanthat of the first beam array implemented to emit charged particle beamsby the multiple beam irradiation mechanism;

transferring, in order of shot, the shot data for the second beam arraywhose number of beams is smaller than that of the first beam arrayimplemented;

storing shot data for an n-th shot having been transferred in eachregister of registers for the second beam array in a plurality ofregisters each arranged for a corresponding beam of the first beamarray, and simultaneously, storing at least a part of shot data for an(n+1)th shot in each register of registers, in the plurality ofregisters, for a third beam array which is other than the second beamarray in the first beam array;

writing a pattern on a target object by performing he n-th shot of thesecond beam array; and

shifting, in a case of the n-th shot having been completed, the shotdata for the (n+1)th shot at least from the each register for the thirdbeam array to the each register for the second beam array.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic diagram showing a configuration of a writingapparatus according to a first embodiment;

FIG. 2 is a conceptual diagram showing a configuration of a shapingaperture array substrate according to the first embodiment;

FIG. 3 is a sectional view showing a configuration of a blankingaperture array mechanism according to the first embodiment;

FIG. 4 is a top view conceptual diagram showing a portion of thestructure in a membrane region of a blanking aperture array mechanismaccording to the first embodiment;

FIG. 5 shows an example of an individual blanking mechanism according tothe first embodiment;

FIG. 6 is a conceptual diagram describing an example of a writingoperation according to the first embodiment;

FIG. 7 shows an example of an irradiation region of multiple beams and apixel to be written (writing pixel) according to the first, embodiment;

FIG. 8 illustrates an example of a writing method of multiple beamsaccording to the first embodiment;

FIG. 9 is a flowchart showing main steps of a writing method accordingto the first, embodiment;

FIGS. 10A and 10B each illustrates a beam array region according to thefirst embodiment;

FIG. 11 is a schematic diagram showing the internal configuration of anindividual blanking control circuit according to the first embodiment;

FIGS. 12A to 12D illustrate a data transfer method in a high-accuracywriting mode according to the first embodiment;

FIG. 13 illustrates an example of a positional deviation map definingthe amount of positional deviation of each beam according to the firstembodiment;

FIG. 14 illustrates an example of a current density distribution ofmultiple beams according to the first embodiment;

FIGS. 15A and 15B show examples of a time chart according to the firstembodiment;

FIG. 16 shows an example of a lens control value table according to thefirst embodiment;

FIG. 17 shows an example of a relation between a total beam currentamount and the number of times of shots according to the firstembodiment;

FIG. 18 is a conceptual diagram showing a configuration of a writingapparatus according to a second embodiment;

FIG. 19 is a schematic diagram showing the internal configuration of anindividual blanking control circuit and a common blanking controlcircuit according to the second embodiment.;

FIG. 20 shows an example of digit numbers of a plurality of dividedshots and their corresponding irradiation time according to the secondembodiment;

FIG. 21 is a flowchart showing main steps of a writing method accordingto a third embodiment;

FIG. 22 shows an example of a method for region division according tothe third embodiment;

FIG. 23 is a schematic diagram showing the internal configuration of anindividual blanking control circuit according to the third embodiment;

FIG. 24 shows transfer processing of an ON/OFF control signal formultiple beams and operations in a control circuit according to thethird embodiment;

FIG. 25 shows an example of a relation between the total beam currentamount, and the number of times of shots according to the thirdembodiment;

FIGS. 26A and 26B show examples of a time chart according to the thirdembodiment and a comparative example;

FIGS. 27A and 27B are conceptual diagrams showing another example of theinternal configuration of an individual blanking control circuitaccording to the third embodiment;

FIG. 28 is a schematic diagram showing the internal configuration of anindividual blanking control circuit and a common blanking controlcircuit according to a fourth embodiment;

FIG. 29 shows transfer processing of an ON/OFF control signal formultiple beams and operations in a control circuit according to thefourth embodiment; and

FIG. 30 shows an example of a relation between data transmission timeand divided shot time according to the fourth embodiment.

DETAILED DESCRIPTION CF THE INVENTION

Embodiments below describe a writing apparatus and method that cansuppress degradation of writing accuracy due to the Coulomb effect,while suppressing throughput degradation.

Embodiments below describe a configuration in which an electron beam isused as an example of a charged particle beam The charged particle beamis not limited to the electron beam, and other charged particle beamsuch as an ion beam may also be used.

First Embodiment

FIG. 1 is a schematic diagram showing a configuration of a writing or“drawing” apparatus according to a first embodiment. As shown in FIG. 1, a writing apparatus 100 includes a writing mechanism 150 (multi-beamirradiation mechanism) and a control system circuit 160. The writingapparatus 100 is an example of a multi-charged particle beam writingapparatus. The writing mechanism 150 includes an electron optical column102 and a writing chamber 103. In the electron optical column 102, thereare disposed an electron gun 201, an illumination lens 202, a shapingaperture array substrate 203, a blanking aperture array mechanism 204, areducing lens 205, a limiting aperture substrate 206, an objective lens207, and deflectors 208 and 209. In the writing chamber 103, an XY stage105 is disposed. On the XY stage 105, a target object or “sample” 101such as a mask serving as a writing target substrate is placed whenwriting (exposure) is performed. The target object 101 is, for example,an exposure mask used when fabricating semiconductor devices, or asemiconductor substrate (silicon wafer) for fabricating semiconductordevices. Moreover, the target object 101 may be, for example, a maskblank on which resist has been applied and nothing has yet been written.Further, on the XY stage 105, a mirror 210 for measuring the position ofthe XY stage 105 is placed. An electromagnetic lens is used as theillumination i lens 202, the reducing lens 205, and the objective lens207. Each electromagnetic lens refracts multiple beams (electron beams).

The control system circuit 160 includes a control computer 110, a memory112, a deflection control circuit 130, DAC (digital-analog converter)amplifier units 132 and 134, a lens control circuit 137, a stage controlmechanism 138, a stage position measuring instrument 139, and storagedevices 140, 142, and 144 such as magnetic disk drives. The controlcomputer 110, the memory 112, the deflection control circuit 130, thelens control circuit 137, the stage control mechanism 138, the stageposition measuring instrument 139, arid the storage devices 140, 142,and 144 are connected with each other through a bus (not shown). Writingdata is input from the outside of the writing apparatus 100 into thestorage device 140 (storage unit) and stored therein. The deflectioncontrol circuit 130 is connected to the DAC amplifier circuits 132 and134, and the blanking aperture array mechanism 204 through a bus (notshown). The stage position measuring instrument 139 irradiates themirror 210 on the XY stage 105 with a laser beam, and receives areflected light from the mirror 210. Then, using information of thereflected light, the stage position measuring instrument 139 measuresthe position of the XY stage 105. The lens control circuit 137 controlseach electromagnetic lens, using a lens control value

In the control computer 110, there are arranged a shot data generationunit 50, an array processing unit 62, a data generation method settingstep 64, a data transfer method setting unit 66, a dose modulationamount calculation unit 68, a shot cycle calculation unit 70, a regionsetting unit 72, a lens control unit 74, a transfer processing unit 76,a writing control unit 78, and a registration unit 79. Each of the “ . .. units” such as the shot data generation unit 60, the array processingunit 62, the data generation method setting step 64, the data transfermethod setting unit 66, the dose modulation amount calculation unit 68,the shot cycle calculation unit 70, the region setting unit 72, the lenscontrol unit 74, the transfer processing unit 76, the writing controlunit 78, and the registration unit 79 includes processing circuitry. Asthe processing circuitry, for example, an electric circuit, computer,processor, circuit, board, quantum circuit, or semiconductor device isused. Each “ . . . unit” may use common processing circuitry (the sameprocessing circuitry), or different processing circuitry (separateprocessing circuitry). Information input/output to/from the shot datageneration unit 60, the array processing unit 62, the data generationmethod setting step 64, the data transfer method setting unit 66, thedose modulation amount calculation unit 68, the shot cycle calculationunit 70, the region setting unit 72, the lens control unit 74, thetransfer processing unit 76, the writing control unit 78, and theregistration unit 79, and information being operated are stored in thememory 112 each time

FIG. 1 shows a configuration necessary for describing the firstembodiment. Other configuration elements generally necessary for thewriting apparatus 100 may also be included therein.

FIG. 2 is a conceptual diagram showing a configuration of a shapingaperture array substrate according to the first embodiment. As shown inFIG. 2 , holes (openings) 22 of p rows long (length in the y direction)and q columns wide (width in the x direction) (p≥2, q≥2) are formed,like a matrix, at a predetermined arrangement pitch in the shapingaperture array substrate 203. In the case of FIG. 2 , for example, holes(openings) 22 of 512×512, that is 512 (rows of holes arrayed in the ydirection)×512 (columns of holes arrayed in the x direction), areformed. Each of the holes 22 is a rectangle (including a square) havingthe same dimension and shape Alternatively, each of the holes 22 may bea circle with the same diameter. Multiple beams 20 are formed by lettingportions of an electron beam 200 individually pass through acorresponding one of a plurality of holes 22. Although the holes 22 arearranged in a grid in the x and y directions in FIG. 2 , thearrangement, is not limited thereto. For example, with respect to thekth and the (k+1)th rows which are arrayed (accumulated) in the lengthdirection (in the y direction) and each of which is in the x direction,each hole in the kth row and each hole in the (k+1)th row may bemutually displaced in the width direction (in the x direction) by adimension “a”Similarly, with respect to the (k+1)th and the (k+2)th rowswhich are arrayed (accumulated) in the length direction (in the ydirection) and each of which is in the x direction, each hole in the(k+1)th row and each hole in the (k+2)th row may be mutually displacedin the width direction (in the x direction) by a dimension “b”, forexample.

FIG. 3 is a sectional view showing a configuration of a blankingaperture array mechanism according to the first embodiment.

FIG. 4 is a top view conceptual diagram showing a portion of thestructure in a membrane region of a blanking aperture array mechanismaccording to the first embodiment. The position relation of a controlelectrode 24, a counter electrode 26, a control circuit 41, and a pad 43in FIG. 3 is not in accordance with that of FIG. 4 . With regard to thestructure of the blanking aperture array mechanism 204, a semiconductorsubstrate 31 made of silicon, etc. is placed on a support table 33 asshown in FIG. 3 . The central part of the substrate 31 is shaved fromthe back side, and made into a membrane region 330 (first region) havinga thin film thickness h The periphery surrounding the membrane region330 is an outer peripheral region 332 (second region) having a thickfilm thickness H. The upper surface of the membrane region 330 and theupper surface of the outer peripheral region 332 are formed to fee flushor substantially flush in height with each other. At the back side ofthe outer peripheral region 332, the substrate 31 is supported on thesupport table 33. The central part of the support table 33 is open, andthe membrane region 330 is located at this opening region.

In the membrane region 330, passage holes 23 (openings) through each ofwhich a corresponding one of multiple beams passes are formed atpositions each corresponding to each hole 22 of the shaping aperturearray substrate 203 shown in FIG. 2 . In other words, in the membraneregion 330 of the substrate 31, there are formed a plurality of passageholes 25 in an array through each of which a corresponding beam ofelectron multiple beams passes. Moreover, in the membrane region 330 ofthe substrate 31, there are arranged a plurality of electrode pairs eachcomposed of two electrodes being opposite to each other with respect toa corresponding one of a plurality of passage holes 25. Specifically, inthe membrane region 330, as shown in FIGS. 3 and 4 , each pair (blanker:blanking deflector) of the control electrode 24 and the counterelectrode 26 for blanking deflection is arranged close to acorresponding passage hole 25 in a manner such that the electrodes 24and 26 are opposite to each other across the passage hole 25 concerned.Moreover, close to each passage hole 25 in the membrane region 330 ofthe substrate 31, there is arranged the control circuit 41 (logiccircuit) which applies a deflection voltage to the control electrode 24for the passage hole 25 concerned. The counter electrode 26 for eachbeam is grounded (earthed).

As shown in FIG. 4 , n bit (e.g., ten bit) parallel lines for controlsignals are connected to each control circuit 41. In addition to then-bit parallel lines for control signals, lines for a clock signal, apower supply, and the like are connected to each control circuit 41.Alternatively, a part of the parallel lines may be used as the lines fora clock signal, a power supply, and the like An individual blankingmechanism 47 composed of the control electrode 24, the counter electrode26, and the control circuit 41 is configured for each of the multiplebeams. In the case of FIG. 3 , the control electrode 24, the counterelectrode 26, and the control circuit 41 are arranged in the membraneregion 330 having a thin film thickness of the substrate 31. However, itis not limited thereto. For example, a plurality of control circuits 41formed in an array in the membrane region 330 are grouped into two(e.g., left half and right half) per row (in the x direction), and thecontrol circuits 41 in the same group are connected in series as shownin FIG. 4 . The pad 43 arranged for each group sends a signal to thecontrol circuits 41 in the group concerned. Specifically, a shiftregister (to be described later) is arranged in each control circuit 41.Then, with respect to beams in the same row in p×q multiple beams, shiftregisters in the control circuits in the left-half group are connectedin series, for example Similarly, with respect to beams in the same row,shift registers in the control circuits in the right-half group areconnected in series, for example.

In the first embodiment, it is configured such that a high-speed writingmode emphasizing the throughput even at the cost of the writingaccuracy, or a high-accuracy writing mode emphasizing the writingaccuracy even at the cost of the throughput can be selected. Whenperforming writing in a high-speed writing mode, ail of the p×q multiplebeams implemented (mounted) in the writing apparatus 100 are used forthe writing. In that case, as described above, so-called blurring and/orpositional deviation of an image of the multiple beams may occur due tothe Coulomb effect. On the other hand, when performing writing in ahigh-accuracy writing mode, a part of the p×q multiple beamsimplemented/mounted in the writing apparatus 100, which is obtained byrestricting usable beam arrays, are used for the writing. It should beunderstood that the term “all of the multiple beams” herein does notinclude defective beams whose dose is difficult to control because offailure of the control circuit 41, etc., and, thus, indicates all ofusable beam arrays.

When performing writing in the high-speed writing mode which uses allthe p×q multiple beams, control signals for beams in the left half ofthe same row of the p×q multiple beams are transmitted in series, andcontrol signals for beams in the right half of the same row are alsotransmitted in series. In the case where p beams are arranged per row, acontrol signal for each beam is stored in a corresponding controlcircuit 41 by clock signals performed p/2 times, for example

Moreover, a blanking (ELK) line, which directs each column to be aneffective (valid) column or an ineffective (invalid) column, isconnected in series in the y direction to the control circuits 41 ineach column, to be orthogonal to the arrangement direction of thecontrol circuits 41 in each group. In the high-accuracy writing modethat restricts beam arrays to be used, a signal from the BLK linerestricts effective (valid) columns, and performs writing using a partof the effective (valid) columns as will be described later.

FIG. 5 shows an example of an individual blanking mechanism according tothe first embodiment. As shown in FIG. 5 , an amplifier 46 (an exampleof a switching circuit) is arranged in the control circuit 41. In thecase of FIG. 5 , a CMOS (complementary MO5) inverter circuit is arrangedas an example of the amplifier 46. The CMOS inverter circuit isconnected to a positive potential (Vdd: blanking electric potential:first electric potential) (e.g., 5 V) and to a ground potential (GND:second electric potential). The output line (OUT) of the CMOS invertercircuit is connected to the control electrode 24. On the other hand, thecounter electrode 26 is applied with a ground electric potential. Aplurality of control electrodes 24, each of which is applied with ablanking electric potential and a ground electric potential in aswitchable manner, are arranged on the substrate 31 such that eachcontrol electrode 24 and the corresponding counter electrode 26 areopposite to each other with respect to a corresponding one of aplurality of passage holes 25.

As an input (IN) of each CMOS inverter circuit, either an L (low)electric potential (e.g., ground potential) lower than a thresholdvoltage, or an H (high) electric potential (e.g., 1.5 V) higher than orequal to the threshold voltage is applied as a control signal. Accordingto the first, embodiment, in a state where an L electric potential isapplied to the input (IN) of the CMOS inverter circuit, the output (OUT)of the CMOS inverter circuit becomes a positive potential (Vdd), andthen, a corresponding electron beam 20 is deflected by an electric fielddue to a potential difference from the ground potential of the counterelectrode 26 so as to be blocked by the limiting aperture substrate 206,thereby being controlled to be in a beam OFF condition. On the otherhand, in a state (active state) where an H electric potential is appliedto the input (IN) of the CMOS inverter circuit, the output (OUT) of theCMOS inverter circuit becomes a ground potential, and therefore, sincethere is no potential difference from the ground potential of thecounter electrode 26, a corresponding electron beam 20 is not deflected,thereby being controlled to be in a beam ON condition by making the beamconcerned pass through the limiting aperture substrate 206.

The electron beam 20 passing through a corresponding passage hole isdeflected by a voltage independently applied to a pair of the controlelectrode 24 and the counter electrode 26. Blanking control is providedby this deflection. Specifically, a pair of the control electrode 24 andthe counter electrode 26 individually provides blanking deflection of acorresponding electron beam of multiple beams by an electric potentialswitchable by the CMOS inverter circuit which serves as a correspondingswitching circuit. Thus, each of a plurality of blankers performsblanking deflection of a corresponding beam in the multiple beams havingpassed through a plurality of holes 22 (openings) in the shapingaperture array substrate 203.

Next, operations of the writing mechanism 150 will be described. Theelectron beam 200 emitted from the electron gun 201 (emission source)almost perpendicularly (e.g., vertically) illuminates the whole of theshaping aperture array substrate 203 by the illumination lens 202. Aplurality of rectangular (including square, etc.) holes 22 (openings)are formed in the shaping aperture array substrate 203. The regionincluding all the plurality of holes 22 is irradiated with the electronbeam 200. For example, a plurality of rectangular, including a square,electron beams (multiple beams) 20 a to 20 e are formed by lettingportions of the electron beam 200, which irradiates the positions of aplurality of holes 22, individually pass through a corresponding hole ofthe plurality of holes 22 of the shaping aperture array substrate 203.The multiple beams 20 a to 20 e individually pass through correspondingblankers (a pair of the control electrode 24 and the counter electrode26) (first deflector: individual blanking mechanism 47) of the blankingaperture array mechanism 204. The blanker provides blanking control suchthat at least an electron beam 20 individually passing through theblanker becomes in an ON condition during a writing time (irradiationtime) having been set.

The multiple beams 20 a to 20 e having passed through the blankingaperture array mechanism 204 are reduced by the reducing lens 205, andgo toward the hole in the center of the limiting aperture substrate 206.Then, the electron beam 20 which was deflected by the blanker of theblanking aperture array mechanism 204 deviates (shifts) from the hole inthe center of the limiting aperture substrate 206 (blanking aperturemember), and is blocked by the limiting aperture substrate 206. On theother hand, the electron beams 20 which was not deflected by the blankerof the blanking aperture array mechanism 204 passes through the hole inthe center of the limiting aperture substrate 206 as shown in FIG. 1 .Thus, the limiting aperture substrate 206 blocks each beam which wasdeflected to be in the OFF condition by the individual blankingmechanism 47. Then, for each beam, one shot beam is formed by a beamwhich has been made during a period from becoming beam ON to becomingbeam OFF end has passed through the limiting aperture substrate 206. Themultiple beams 20 having passed through the limiting aperture substrate206 are focused by the objective lens 207 so as to be a pattern image ofa desired reduction ratio. Then, respective beams (all the multiplebeams 20) having passed through the limiting aperture substrate 206 arecollectively deflected in the same direction by the deflectors 208 and209 to irradiate respective beam irradiation positions on the targetobject 101. Moreover, while the XY stage 105 is continuously moving,controlling is performed by the deflector 208 so that the irradiationpositions of the beams may follow the movement of the XY stage 105.Ideally, the multiple beams 20 irradiating at a time are aligned at thepitch obtained by multiplying the arrangement pitch, of a plurality ofholes 22 in the shaping aperture array substrate 203 by the desiredreduction ratio described above.

FIG. 6 is a conceptual diagram describing an example of a writingoperation according to the first embodiment. As shown in FIG. 6 , awriting region 30 of the target object 101 is virtually divided, by apredetermined width in the y direction, into a plurality of striperegions 32 in a strip form, for example. First, the XY stage 105 ismoved to make an adjustment such that an irradiation region 34 which canbe irradiated with one shot of the multiple beams 20 is located at theleft end of the first stripe region 32 or at a position further leftthan the left end, and then writing is started. When writing the firststripe region 32, the XY stage 105 is moved, for example, in the −xdirection, so that the writing may relatively proceed in the x directionThe XY stage 105 is moved, for example, continuously at a constantspeed. After writing the first stripe region 32, the stage position ismoved in the −y direction to make an adjustment such that theirradiation region 34 is located at the right end of the second striperegion 32 or at a position further right than the right end to be thuslocated relatively in the y direction. Then, by moving the XY stage 105in the x direction, for example, writing proceeds in the −x direction.That is, writing is performed while alternately changing the direction,such as performing writing in the x direction in the third stripe region32, and in the −x direction in the fourth stripe region 32, therebyreducing the writing time However, the writing operation is not limitedto the writing while alternately changing the direction, and it is alsopreferable to perform writing in the same direction when writing eachstripe region 32. A plurality of shot patterns up to as many as thenumber of the holes 22 are formed at a time by one shot (total ofirradiation steps to be described later) of multiple beams having beenformed by passing through the holes 22 in the shaping aperture arraysubstrate 203.

The irradiation region 34 described above can be defined as arectangular (including square) region whose x-direction dimension is avalue obtained by multiplying the pitch between beams in the x directionby the number of beams in the x direction, and y-direction dimension isa value obtained by multiplying the pitch between beams in the ydirection by the number of beams in the y direction According to thefirst embodiment, in the high-speed writing mode, all of the multiplebeams 20 implemented/mounted in the writing apparatus are used for thewriting. On the other hand, in the high-accuracy writing mode, theregion of the beam array to be used is restricted as will be describedlater. Accordingly, the size of the irradiation region 34 is differentbetween the high-speed writing mode and the high-accuracy writing mode.

FIG. 7 shows an example of an irradiation region of multiple beams and apixel to be written (writing pixel) according to the first embodiment.In FIG. 7 , the stripe region 32 is divided into a plurality of meshregions by the beam size of each of the multiple beams, for example Eachmesh region serves as a writing pixel 36 (unit irradiation region, orwriting position). The size of the writing pixel 36 is not limited tothe beam size, and may be an arbitrary size regardless cf the beam sizeFor example, it may be 1/n (n being an integer of 1 or more) of the beamsize FIG. 7 shows the case where the writing region of the target object101 is divided, for example, in the y direction, into a plurality ofstripe regions 32 by the width size being substantially the same as thesize of the irradiation region 34 (writing field) which can beirradiated by one irradiation with the multiple beams 20. The width ofthe stripe region 32 is not limited to this. Preferably, the width ofthe stripe region 32 is n times (n being an integer of 1 or more) thesize of the irradiation region 34. FIG. 7 shows the case of multiplebeams of 512 (rows)×512 (columns). In the irradiation region 34, thereare shown a plurality of pixels 28 (beam writing positions) which can beirradiated with one shot of the multiple beams 20. In other words, thepitch between adjacent pixels 28 is the pitch between beams of themultiple beams. In the example of FIG. 7 , one sub-irradiation region 29is a square region surrounded by four adjacent pixels 28 at four cornersbut including just one of the four pixels 28. In the case of FIG. 7 ,each sub-irradiation region 29 is composed of 4×4 pixels including onepixel 28.

FIG. 8 illustrates an example of a writing method of multiple beamsaccording to the first embodiment. FIG. 8 shows a portion of thesub-irradiation region 29 to be written by each of beams at thecoordinates (1, 3), (2, 3), (3, 3), . . . , (512, 3) in the third rowfrom the bottom in the multiple beams for writing the stripe region 32shown in FIG. 7 . In the example of FIG. 3 , while the XY stage 105moves the distance of eight beam pitches, four pixels are written(exposed), for example In order that the relative position between theirradiation region 34 and the target object 101 may not shift by themovement of the XY stage 105 while these four pixels are written(exposed), the irradiation region 34 is made to follow the movement ofthe XY stage 105 by collective deflection of all the multiple beams 20by the deflector 208. In other words, tracking control is performed. Inthe case of FIG. 8 , one tracking cycle is executed by writing(exposing) four pixels while moving the distance of eight beam pitches.

Specifically, the stage position measuring instrument 139 measures theposition of the XY stage 105 by irradiating the mirror 210 with a laserand receiving a reflected light from the mirror 210. The measuredposition of the XY stage 105 is output to the control computer 110. Inthe control computer 110, the writing control unit 73 outputs theposition information on the XY stage 105 to the deflection controlcircuit 130. While being in accordance with the movement, of the XYstage 105, the deflection control circuit 130 calculates deflectionamount data (tracking deflection data) for deflecting beams to followthe movement of the XY stage 105. The tracking deflection data being adigital signal is output to the DAC amplifier unit 134. The DACamplifier unit 134 converts the digital signal to an analog signal andamplifies it to be applied as a tracking deflection voltage to thedeflector 208.

The writing mechanism 150 irradiates each pixel 36 with a cor respondingone of ON beams of the multiple beams 20 during a writing time(irradiation time or exposure time) corresponding to the pixel 36concerned within a maximum irradiation time Ttr of the irradiation timeof each of the multiple beams in the shot concerned.

In the example of FIG. B, the first pixel from the right in the bottomrow of the sub-irradiation region 29 concerned is irradiated with a beamof the first shot using the beam (1) at coordinates (1, 3) during thetime from t=0 to t=maximum irradiation time Ttr. The XY stage 105 movestwo beam pitches in the −x direction during the time from t=0 to t=Ttr,for example During this time period, the tracking operation iscontinuously performed.

After the maximum irradiation time Ttr of the shot concerned has elapsedsince the start of beam irradiation with the shot concerned, while thebeam deflection for tracking control is continuously performed by thedeflector 208, the writing position (previous writing position) of eachbeam is shifted to a next writing position (current writing position) ofeach beam by collective deflection of the multiple beams 20 by thedeflector 209, which is performed in addition to the beam deflection fortracking control. In the example of FIG. 8 , when the time becomest=Ttr, the target pixel to be written is shifted from the first pixelfrom the right in the bottom row of the sub-irradiation region 29concerned to the first, pixel from the right in the second row from thebottom Since the XY stage 105 is moving at a fixed speed also duringthis time period, the tracking operation is continuously performed.

Then, while the tracking control is continuously performed, eachcorresponding one of ON beams in the multiple beams 20 is applied to theshifted writing position corresponding to the each beam during a writingtime corresponding to each beam within the maximum irradiation time Ttrof the shot concerned. In the example of FIG. 8 , the first pixel from,the right in the second row from the bottom of the sub-irradiationregion 29 concerned is irradiated with the second shot of the beam (1)at the coordinates (1, 3) during the time t=Ttr to t=2Ttr. The XY stage105 moves, for example, two beam pitches in the −x direction during thetime from t=Ttr to t=2Ttr. During this time period, the trackingoperation is continuously performed.

In the example of FIG. 8 , when the time becomes t=2Ttr, the targetpixel to be written is shifted from the first pixel from the right inthe second row from the bottom of the sub-irradiation region 29concerned to the first pixel from the right in the third row from thebottom by collective deflection of the multiple beams by the deflector209. Since the XY stage 105 is moving also during this time period, thetracking operation is continuously performed. Then, the first pixel fromthe tight in the third row from the bottom of the sub-irradiation region29 concerned is irradiated with the third shot of the beam (1) at thecoordinates (1, 3) during the time from t=2Ttr to t=3Ttr, for exampleThe XY stage 105 moves, for example, two beam pitches in the −xdirection during the time from t=2Ttr to t=3Ttr. During this timeperiod, the tracking operation is continuously performed. When the timebecomes t=3Ttr, the target pixel to be written is shifted from the firstpixel from be right in the third row from the bottom of thesub-irradiation region 29 concerned to the first pixel from the right inthe fourth row from the bottom by collective deflection of the multiplebeams by the deflector 209. Since the XY stage 105 is moving also duringthis time period, the tracking operation is continuously performed.Then, the first pixel from the right in the fourth row from the bottomof the sub-irradiation region 29 concerned is irradiated with the fourthshot of the beam (1) at the coordinates (1, 3) during the time fromt=3Ttr to t=4Ttr, for example. The XY stage 105 moves, for example, twobeam pitches in the −x direction during the time from t=3Ttr to t=4Ttr.During this time period, the tracking operation is continuouslyperformed. In this manner, writing of the pixels in the first columnfrom the right of the sub-irradiation region 29 concerned has beencompleted.

In the example of FIG. 8 , after applying a corresponding beam to thewriting position of each beam which has been shifted three times fromthe initial position, the DAC amplifier unit 134 returns the trackingposition to the start position of tracking where the tracking controlwas started, by resetting the beam deflection for tracking control. Inother words, the tracking position is returned in the opposite directionto the direction of the stage movement. In the example of FIG. 8 , whenthe time becomes t=4Ttr, tracking of the sub-irradiation region 29concerned is cancelled, and the beam is swung back to a next targetsub-irradiation region 29 shifted by eight beam pitches in the xdirection Although the beam (1) at the coordinates (1, 3) has beendescribed in the example of FIG. 8 , writing is also similarly performedfor each sub-irradiation region 29 corresponding to a beam at othercoordinates. That is, when the time becomes t=4Ttr, the beam atcoordinates (n, m) completes writing of pixels in the first column fromthe right in a corresponding sub-irradiation region 29. For example, thebeam (2) at coordinates (2, 3) of FIG. 7 completes writing of pixels inthe first column from the right in the sub-irradiation region 29adjacent in the −x direction to the sub-irradiation region 29 for thebeam (1).

Since writing of the pixels in the first column from the right of eachsub-irradiation region 29 has been completed, in a next tracking cycleafter resetting the tracking, the deflector 209 performs deflection suchthat the writing position of each corresponding beam is adjusted(shifted) to the second pixel from the right in the first row from, thebottom of each sub-irradiation region 29.

As described above, in the state where the relative position of theirradiation region 34 to the target object 101 is controlled by thedeflector 208 to be the same (unchanged) position during the sametracking cycle, each shot is carries out while performing shifting fromone pixel to another pixel by the deflector 209. Then, after finishingone tracking cycle and returning the tracking position of theirradiation region 34, the first shot position is adjusted to theposition shifted by for example, one pixel as shown in the lower part ofFIG. 6 , and each shot is performed shifting from one pixel to anotherpixel by the deflector 209 while executing a next tracking control. Byrepeating this operation during writing the stripe region 32, theposition of the irradiation region 34 is shifted consecutively, such asfrom 34 a to 34 c, to perform writing of the stripe region concerned.

FIG. 9 is a flowchart showing main steps of a writing method accordingto the first embodiment. In FIG. 9 , the writing method of the firstembodiment executes a series of steps: a. reference parameter settingstep (S102), a beam calibration step (S104), a writing job registrationstep (S106), a beam array region setting step (S108), a data generationmethod setting step (S110), a data transfer method setting step (S112),an irradiation time data generating step (S120), a data array processingstep (S122), an irradiation time data generating step (S130), a dataarray processing step (S132), a maximum dose modulation amountcalculating step (S134), a shot cycle calculating step (S136), a shotcycle setting step (S133), a lens control value changing step (S140), afocus checking step ($142), a determining step (S144), a lens controlvalue correcting step (S146), a data transfer step (S150), and a writingstep (S152).

In the reference parameter setting step (S102), the writing control unit78 sets a reference parameter which is applied when used are all of p×qmultiple beams 20 implemented to be emittable by the writing mechanism150, for example For example, there are set a dose correctioncoefficient for correcting the amount of positional deviation of theirradiation position of each beam of the multiple beams 20, and a dosecorrection coefficient D_(J(k)) for correcting a current density inaccordance with a current density distribution. Each data of apositional deviation map defining the amount of positional deviation ofthe irradiation position of each beam, and a current densitydistribution is input from the outside of the writing apparatus 100, andstored in the storage device 144, for example The dose D of each beam toirradiate can be obtained by multiplying the reference dose d_(base) bythe area density of a pattern in the pixel 36, a proximity effectcorrection irradiation coefficient D_(p) for correcting a proximityeffect, a dose correction coefficient D_(m), and a dose correctioncoefficient D_(J). Moreover, there is a need to set, as a referenceparameter, a shot cycle (time) which enables to make a shot of themaximum dose of the dose D in the case of using ail of the multiplebeams 20. For example, a shot cycle (time) is set up in consideration ofthe maximum irradiation time and the data transfer time for each shotwhich are used in the case of the maximum dose modulation such as aroundthree to five times the reference dose

In the beam calibration step (S104), the lens control unit 74 adjustslens control values for exciting the illumination lens 202, the reducinglens 205, and the objective lens 207, which are used to refract themultiple beams 20, employed in the case of using all of p×q multiplebeams 20 implemented to be emittable by the writing mechanism 150. Then,the lens control unit 74 sets the adjusted lens control values in thelens control circuit 137. The lens control circuit 137 flows a currentin accordance with a corresponding lens control value in eachelectromagnetic lens in order to excite it. When all of the p×q multiplebeams 20 implemented to be emittable by the writing mechanism 150 areused, the total current amount per shot is large. Then, based on thebeam with the large total amount of current, the focus position isadjusted by the objective lens 207, and a corresponding lens controlvalue is set.

As described above, preparation proceeds for the high-speed writing modein which used are all of the p×q multiple beams implemented to beemittable by the writing mechanism 150, for example.

In the writing job registration step (S106), the registration unit 79registers a writing JOB.

In the beam array region setting step (S108), the region setting unit 72sets the region of the beam array to be used, for example, in the wholeregion of the p×q multiple beams 20 implemented to be emittable by thewriting mechanism 150.

FIGS. 10A and 10B each illustrates a beam array region according to thefirst embodiment. FIGS. 10A and 10B show the case of 8×8 multiple beams20 implemented to be emittable by the writing mechanism 150. When usingthe high-speed writing mode, as shown in FIG. 10A, the region settingunit 72 sets the region of all the multiple beams 20 implemented to beemittable by the writing mechanism 150, as an irradiation region (useregion) of the beam array to be used. In the example of FIG. IDA, theregion setting unit 72 sets the region of all the 8×8 multiple beams 20.In contrast, in the case of using the high-accuracy writing mode, asshown in FIG. 10B, the region setting unit 72 sets a region of thecentral portion of the whole region of p×q multiple beams 20 implementedto be emittable by the writing mechanism 150, as an irradiation regionof the beam array to be used, for example The region is set such that ahalf of the number of beams in the x direction in the central portion ofthe region for all the multiple beams 20 is equal to the number of beamsin the x direction in each end side portion in the x direction of theregion for all the multiple beams 20. In the example of FIG. 10B, theregion setting unit 72 sets the region of the beam array of 4×4 beams atthe central portion of the whole region of the multiple beams 20. Thus,the use region of the beam array is restricted. Thereby, the totalcurrent amount per shot can foe made small. As a result, it is possibleto suppress degradation of writing accuracy due to the Coulomb effect.In the example of FIG. 10B, since the beam array of 8×8 multiple beams20 has been restricted to that of 4×4 beams, the amount of current canbe reduced to around 1/4 in a simple calculation

In the data generation method setting step (S110), the data generationmethod setting step 64 sets up a method for generating irradiation timedata (shot data) depending on the use region of the beam array. In thecase of using the high-speed writing mode, the data generation methodsetting step 64 performs setting, for each shot, to generate data forall the multiple beams 20 implemented to be emittable by the writingmechanism 150. In contrast, in the case of using the high accuracywriting mode, the data generation method setting step 64 performssetting to generate data for beam rows including the use region havingbeen restricted. In the example of FIG. 10B, the data generation methodsetting step 64 performs setting to generate data not only for the useregion being the beam array of 4×4 beams in the central portion but alsofor the beam array of 2×4 beams located upper part (in the y direction)of the use region, and the beam array of 2×4 beams located lower part(in the y direction) of the use region However, the data generationmethod setting step 64 performs setting to always generate irradiationtime data of beam OFF (irradiation time zero) for the beam array of 2×4beams located upper part (in the y direction) of the use region, and thebeam array of 2×4 beams located lower part (in the y direction) of theuse region

In the data transfer method setting step (S112), the data transfermethod setting unit 66 sets up a data transfer method depending on theuse region of the beam array.

FIG. 11 is a schematic diagram showing the internal configuration of anindividual blanking control circuit according to the first embodiment.As shown in FIG. 11 , in each control circuit 41 for individual blankingcontrol disposed in the blanking aperture array mechanism 204 inside thebody of the writing apparatus 100, there are arranged a shift register40, a register 43, an AMD circuit 49, a counter 44, and an amplifier 46,Thus, a plurality of shift registers 40 and a plurality of registers 43each of which stores shot data of a corresponding easy are arranged foreach beam of the multiple beams 20 (the first beam array) implemented tobe emit table by the writing mechanism 150. According to the firstembodiment, individual blanking control for each beam performed by ann-bit (e.g., 10-bit) control signal. Here, for example, with respect tothe multiple beams 20 composed of p×q beams in an array (matrix), theshift registers 40 in the control circuits 41 for the left half (firstto p/2th beams in the x direction) of p beams in the x direction and inthe same row are connected in series from the peripheral side toward thecenter side (in the x direction), for example. The example of FIG. 11shows the case where shift registers 40 a, 40 b, 40 c, and 40 d of thecontrol circuits 41 for four beams arrayed in the left half in the samerow are connected in series. Similarly, the shift registers 40 in thecontrol circuits 41 for the right half ((p/2+1)th to pth beams the xdirection) p beams in the x direction and in the same row are connectedseries from the peripheral side toward the center side (in the ×xdirection), for example.

When irradiating with all the multiple beams 20 implemented to beemittable by the writing mechanism 150, there exist, for one shot ofmultiple beams, n-bit control signals for controlling ON/OFF of multiplebeams grouped per left half each row of the multiple beams, where thenumber of the grouped ON/OFF control signals is the same as the numberof rows of the multiple beams, and n-bit control signals for controllingON/OFF of multiple beams grouped per right half of each row of themultiple beams, where the number of the grouped ON/OFF control signalsis also the same as the number of rows of the multiple beams. Therefore,in the case of using the high-speed writing mode, the data transfermethod setting unit 66 performs setting to transfer the control signalsfor controlling ON/OFF of multiple beams grouped per left half of eachrow of the multiple beams 20, and the n-bit control signals forcontrolling ON/OFF of multiple beams grouped per right half of each rowof the multiple beams 20. Such data groups are transmitted in a batchfrom the deflection control circuit 130 to the blanking aperture arraymechanism 204, for each shot of the multiple beams. For example, suchdata groups ate collectively transmitted in parallel. The ON/OFF controlsignal for each beam is stored in a corresponding shift register 40 byclock signals performed p/2 times, for example. In the case of FIG. 11 ,ON/OFF control signals for four beams are stored in the correspondingshift registers 40 a, 40 b, 40 c, and 40 d by clock signals performedfour times.

In contrast, when irradiating with beams in the beam array in thecentral portion, there are needed, for one shot of multiple beams, n-bitcontrol signals for controlling ON/OFF of multiple beams grouped perhalf on the central portion side in the left half of each row of themultiple beams, where the number of the grouped ON/OFF control signalsis the same as the number of rows of the multiple beams, and n-bitcontrol signals for controlling ON/OFF of multiple beams grouped perhalf on the central portion side in the right half of each row of themultiple beams, where the number of the grouped ON/OFF control signalsis also the same as the number of rows of the multiple beams. Therefore,in the case of using the high-speed writing mode, the data transfermethod setting unit 66 performs setting to transfer the n-bit controlsignals for controlling ON/OFF of multiple beams grouped per half on thecentral portion side in the left half of each row of the multiple beams,and the n-bit control signals for controlling ON/OFF of multiple beamsgrouped per half on the central portion side in the right half of eachrow of the multiple beams. Such data groups are transmitted in a batchfrom the deflection control circuit 130 to the blanking aperture arraymechanism 204, for each shot of the multiple beams. For example, suchdata groups are collectively transmitted in parallel. Then, the ON/OFFcontrol signal for each beam in the use region is stored in acorresponding shift register 40 by clock signals performed p/4 times,for example.

In the case of FIG. 11 ON/OFF control signals for two beams in the useregion out of four beams. are stored in the corresponding shiftregisters 40 c and 40 d by clock signals performed four times in thefirst shot, and by those performed twice in the second and subsequentshots.

FIG. 12 to 12D illustrate a data transfer method in a high-accuracywriting mode according to the first embodiment. FIG. 12A shows the statewhere data has not been transferred yet to the shift registers 40 for8×8 multiple beams 20 (the first beam array) implemented to be emittableby the writing mechanism 150, for example. Here, the beam array region4×4 beam in the central portion is set as the use region in the 8×8multiple beams 20 which are mounted to be emittable, for example. ON/OFFcontrol signals for the beam array of beam columns including the useregion of the first shot are transmitted in a batch, for each shot, tothe blanking aperture array mechanism 204 from the deflection controlcircuit 130. Then, data is sequentially shifted from both the left andright ends, and, as shown in FIG. 12B, ON/OFF control signals for thebeam array (the second beam array) of the beam columns (effectivecolumns) including the use region of the first shot (n-th shot) arestored, by clock signals performed twice, in the shift registers 40 aand 40 b for the beam array (the third beam array) in the unused region(ineffective columns) on the upstream side of the use region. Moreover,as shown in FIG. 12C, ON/OFF control signals (shot data) for the n-thshot of the beam array of the beam columns including the use region arestored, by clock signals performed twice, in the shift registers 40 cand 40 d (examples of the register) for the beam array (the second beamarray) of the beam columns (effective columns) including the use region.Simultaneously, each of the shift registers 40 a and 40 b (registers)for the beam array (the third beam array) in the unused region(ineffective columns) on the upstream side of the use region, which isother than the beam array the second beam array) of the beam columnsincluding the use region, in the 8×8 multiple beams 20 (the first beamarray) implemented to be emittable by the writing mechanism 150 storesan ON/OFF control signal (shot data) for the (n+1)th shot of the beamarray (the second beam array) of beam columns including the use region.Then, receiving a read signal from the deflection control circuit 130,each of the registers 43 c and 43 d for the beam array (the second beamarray) of the beam columns (effective columns) including the use regionreads the ON/OFF control signal (shot data) for the n-th shot. Then,responsive to an effective-column-signal from the deflection controlcircuit 130, the AND circuits 49 c and 49 d for the beam array (thesecond beam array) of the beam columns (effective columns) including theuse region output ON/OFF control signals to the counters 44 c and 44 d.Based on a shot signal from the deflection control circuit 130, each ofthe Counters 44 c and 44 d outputs an H potential to the amplifier 46during the irradiation time corresponding to the ON/OFF control signal.Thereby, the beam array (the second beam array) of the beam columns(effective columns) including the use region becomes beam ON during theirradiation time corresponding to the ON/OFF control signal. Sinceirradiation time data of beam OFF (irradiation time zero) is alwaysgenerated for the beam array of 2×4 beams located upper part (in the ydirection) of the use region, and the beam array of 2×4 beams locatedlower part (in the y direction) of the use region, they keep the beamOFF condition. In other words, irradiation time data of beam OFF isalways generated as the irradiation time data of partial beams in thebeam array (the second beam array) of the effective columns.Furthermore, in other words, the beam array (the second beam array) ofthe effective columns is composed of a plurality of beam columns in thecentral portion, of the 8×8 multiple beams 20 (the first beam array)being emittable, and then, irradiation time data of beam OFF is alwaysgenerated as the irradiation time data of beams located on both endsides (in the y direction) of each beam column of the plurality of beamcolumns in the effective column in the central portion. Accordingly,writing processing is performed by the beam array of 4×4 beams in thecentral portion, which is applied as the use region, without the beamslocated (in the y direction) at the both end sides of the effectivecolumns. In addition, the shift registers 40 a and 40 b (registers) forthe beam array (the third beam array) of the ineffective columns maystore at least a part of the ON/OFF control signals (shot data) for the(n+1)th shot of the beam array (the second beam array) of the beamcolumns including the use region.

When receiving a read signal from the deflection control circuit 130,each of the registers 43 c and 43 d reads the ON/OFF control signal(shot data) for the n-th shot, and simultaneously, each of the registers43 a and 43 b for the beam array (the third beam array) of ineffectivecolumns reads the ON/OFF control signal (shot data) for the (n+1)thshot. However, the AND circuits 49 a and 49 b intercept the ON/OFFcontrol signals from the registers 43 a and 4 3 b to the counters 44 aand 44 b, in responsive to an ineffective-column-signal (BLK) from thedeflection control circuit 130. Therefore, the state of the beam array(the third beam array) of ineffective columns is maintained to be beamOFF.

Then, when the n-th shot is completed, as shown in FIG. 12D, shot datafor the (n+1)th shot is individually shifted, by clock signals performedtwice, from each of the shift registers 40 a and 40 b for the beam array(the third beam array) of ineffective columns to each of the shiftregisters 40 c and 40 d for the beam array (the second beam array) ofthe beam columns (effective columns) including the use region.Simultaneously, each of the shift registers 40 a and 40 b (registers)for the beam array (the third beam array) of ineffective columns storesan ON/OFF control signal (shot data) for the (n+2)th shot of the beamarray (the second beam array) of effective columns, &hen each of theshift register 40 a and 40 b (registers) for the beam array (the thirdbeam array) of ineffective columns stores at least a part of the ON/OFFcontrol signal (shot data) for the (n+1)th shot of the beam array (thesecond beam array) of beam columns including the use region, shot datafor the (n+1)th shot is shifted at least from each of the shiftregisters 40 a sod 40 b to each of the shift registers 40 c and 40 d.

As described above, by making the ON/OFF control signal (shot data) foreach shot of the beam array of effective columns including the useregion stand ready in each of the shift registers 40 a and 40 b for thebeam array (the third beam array) of ineffective column, it is possibleto transfer shot data by clock signal performed smaller number of timescompared to those performed in the case of emitting all the beamsmounted. Therefore, the transfer time can be shortened.

Next, steps after the data transfer method setting step (S112) in thehigh-speed writing mode will described below.

In the irradiation time data generating step (S120). the shot datageneration unit 60 generates ah ON/OFF control signal (shot data) foreach shot of all the multiple beams 20 implemented to be emittable bythe writing mechanism 150. First, the shot data generation unit 60virtually divides the writing region (here, for example, stripe region32) into a plurality of proximity mesh regions (mesh regions forproximity effect correction calculation) by a predetermined size. Thesize of the proximity mesh region is preferably about 1/10 of theinfluence range of the proximity effect, such as about 1 μm. The shotdata generation unit 60 reads writing data from the storage device 140,and calculates, for each proximity mesh region, a pattern area density ρof pattern arranged in the proximity mesh region concerned.

Next, the shot data generation unit 60 calculates, for each proximitymesh region, a proximity effect correction irradiation coefficient D_(p)for correcting a proximity effect. Here, the size of the mesh region tocalculate the proximity effect correction irradiation coefficient D_(p)does not need to be the same as that of the mesh region to calculate thepattern area density σ. Moreover, the correction model of the proximityeffect correction irradiation coefficient D_(p) and its calculationmethod may be the same as those used in the conventional single beamwriting method.

Then, the shot date generation unit 60 calculates, for each pixel 36, apattern area density ρ′ in the Pixel 36 concerned. The mesh size of ρ′is set to be the same as the size of the pixel 28.

The shot data generation unit 60 calculates, for each pixel (writingpixel) 36, a dose D with which the pixel 36 concerned is irradiated. Thedose D can be calculated, for example, by multiplying a pre-setreference dose D_(base) by a pattern area density ρ′ of pattern in thepixel 36, a proximity effect correction irradiation coefficient D_(p)for correcting a proximity effect, a dose correction coefficient D_(m)for correcting the amount of positional deviation of the irradiationposition of each beam of the multiple beams 20, and a dose correctioncoefficient D_(J) for correcting a current density in accordance with acurrent density distribution The dose correction coefficient D_(m) andthe dose correction coefficient D_(J) are various depending on each beamof the multiple beams 20. Which pixel 36 is irradiated with which beamis determined based on a writing sequence.

Next, the shot data generation unit 60 calculates, for each pixel 36, anelectron beam irradiation time t for making the calculated dose Dincident on the pixel 36 concerned. The irradiation time t can becalculated by dividing the dose D by a current density J. Then, anirradiation time t map which defines the irradiation time t acquired foreach pixel 36 is generated. The generated t map is stored in the storagedevice 142. According to the first embodiment, for example, a signal ofthe irradiation time t oi each pixel 36 becomes the ON/OFF controlsignal of the pixel 36 concerned. Alternatively, a signal of a countvalue obtained by dividing the irradiation time t of each pixel 36 by aclock period becomes the ON/OFF control signal for the pixel 36concerned.

In the data array processing step (S122), the array processing unit 62rearranges the ON/OFF control signal for each pixel 36 in order of shotand in order of beam transfer.

In the data transfer step (S150), based on the data transfer methodhaving been set, the transfer processing unit 76 transfers, in order ofshot, n-bit ON/OFF control signals for controlling ON/OFF of multiplebeams 20 grouped per left half of each row of the multiple beams 20, andn-bit ON/OFF control signals for controlling ON/OFF of multiple beams 20grouped per right half of each row of the multiple beams 20.

In the writing step (S152), the writing mechanism 150 writes a patternon the target object 101 with the multiple beams 20 implemented to beemittable by the writing mechanism 150. Operations of the writingmechanism 150 and the method of writing have been described above. Inthe beam calibration step (S104), has been set a lens control value foreach electromagnetic lens which is applied when using all of p×qmultiple beams 20 implemented to be emittable by the writing mechanism150. Therefore, the objective lens 207 provides focusing in accordancewith the total amount of current used when using ail the multiple beams20. Thus, although the writing accuracy is degraded because of theCoulomb effect, it is possible to perform writing processing withincreased throughput.

Next, steps after the data transfer method setting step (S112) in thehigh-accuracy writing mode will be described below.

In the irradiation time data generating step (S130), the shot datageneration unit 60 generates ON/OFF control signals (shot data) for thebeam array (the second beam array) whose number of beams is smaller thanthat of the multiple beams 20 (the first beam array) implemented to beemittable by the writing mechanism 150. Specifically, the shot datageneration unit 60 generates an ON/OFF control signal (shot data) foreach shot, of the beam array (the second beam array) of the effectivecolumns including the use region shown in FIG. 12A, etc. As describedabove, irradiation time data of beam OFF (irradiation time zero) isalways generated for the beam array of 2×4 beams located upper part (inthe y direction) of the use region, and the beam array of 2×4 beamslocated lower part (in the y direction) of the use region. The method ofgenerating shot data cf each pixel 36 is what has been described above.As for the method of setting the stripe region 32, its size can be setaccording to the beam array being the use region. Which pixel 36 isirradiated with which beam in the use region is determined based on awriting sequence.

In the data array processing step (S132), the array processing unit 62rearranges the ON/OFF control signal for each pixel 36 in order of shotand in order of beam transfer.

In the maximum dose modulation amount calculating step (S134), the dosemodulation amount calculation unit 68 calculates the maximum dosemodulation amount according to the region having been set.

FIG. 13 illustrates an example of a positional deviation map definingthe amount of positional deviation of each beam according to the firstembodiment. FIG. 13 shows an example of the tendency of the amount ofpositional deviation of each beam in the irradiation region 34 (beamarray region) of all the multiple beams 20 implemented to be emit tableby the writing mechanism 150. When performing irradiation with themultiple beams 20, distortion occurs in an exposure field due to opticalsystem characteristics, and therefore, the irradiation position of eachbeam deviates from an ideal grid because of the distortion. However, inthe optical system of the multiple beams 20, it is difficult to deflecteach beam individually, thereby being difficult to individually controlthe position of each beam on the target object surface. Accordingly, thepositional deviation of each beam is corrected by dose modulation. Forexample, dose modulation of each beam can be performed such that thegravity center of the dose is located in an ideal grid by distributingsome or all of the dose to peripheral beams. Therefore, in many cases,the distributed beam dose amount becomes larger than the amount of thedesign dose itself. For performing such dose modulation, the dosecorrection coefficient D_(m(k)) is set to correct the amount ofpositional deviation of the irradiation position of each bean) of themultiple beams 20. k indicates the index of each beam. As shown in FIG.13 , while the beam positional deviation amount is small in the centralportion, there is a tendency that the beam positional deviation amountbecomes larger as it goes to the peripheral side. The larger the beampositional deviation amount is, the larger the dose correctioncoefficient D_(m(k)) is. In the first embodiment, since the use regionis restricted to the central portion where the amount of beam positionaldeviation is small, the dose correction coefficient d_(m(k)) of eachbeam in this region can be made small. Therefore, the amplitude of thedose correction coefficient D_(m(k)) of the beam array in the region ofthe central portion can be made smaller than that of the dose correctioncoefficient D_(m(k)) of each beam in the region of all the multiplebeams 20. In other words, the maximum value of the dose correctioncoefficient D_(m(k)) of the beam array in the region of the centralportion can be made smaller than that of the dose correction coefficientD_(m(k)) of each beam in the region of all the multiple beams 20.

FIG. 14 illustrates an example of a current density distribution ofmultiple beams according to the first embodiment. FIG. 14 shows anexample of the tendency of a current density distribution of each beamin the irradiation region 34 (beam array region) of all the multiplebeams 20 implemented to be emittable by the writing mechanism 150. Asdescribed above, the multiple beams 20 are formed, for example, byletting one electron beam 200 pass through the shaping aperture arraysubstrate 203. The current density distribution of the electron beam 200decreases on the peripheral side while it is approximately uniform inthe central portion. Therefore, with respect to the formed multiplebeams 20, as shown in FIG. 14 , there is a tendency that the currentdensity distribution of the beam becomes lower as it goes to theperipheral side while it is approximately uniformly high, such as 98% ormore, in the central portion. Therefore, even when performing beamirradiation during a desired irradiation time, the dose incident ontarget object 101 of a beam in the central portion, and that of a beamat the outer peripheral part are different from each other. Accordingly,current density deviation of each beam is corrected by dose modulation.That is, dose modulation is performed with a ratio (1 or more) forcompensating an insufficient current density. Thus, a dose coefficientD_(J(k)) for correcting a current density is set to be in accordancewith a current density distribution of the multiple beams 20. Accordingto the first embodiment, since the use region is restricted to thecentral portion where the current density is high and approximatelyuniform, the dose correction coefficient D_(J(k)) of each beam in thisregion can be made small. Therefore, the amplitude of the, dosecorrection coefficient D_(J(k)) of the beam array in the region of thecentral portion can be made smaller than that of each beam in the regionof all the multiple beams 20. In other words, the maximum value of thedose correction coefficient D_(J(k)) of the beam array in the region ofthe central portion can be made smaller than that of each beam in theregion of all the multiple beams 20.

As described above, the dose D of each beam can be obtained bymultiplying the reference dose D_(base) by the area density of a patternin the pixel 36, the proximity effect correction irradiation coefficientD_(p) for correcting a proximity effect, the dose correction coefficientD_(m), and the dose correction coefficient D_(J). The maximum dosemodulation amount can be obtained by multiplying the proximity effectcorrection irradiation coefficient D_(p), the dose correctioncoefficient D_(m), and the dose correction coefficient D_(J). In thefirst embodiment, since the use region is restricted to the centralportion, the product between the maximum value of the dose correctioncoefficient D_(m) of each beam in the central portion and the maximumvalue of the dose correction coefficient D_(J) can be made smaller thanthe product between the maximum value of the dose correct en coefficientD_(m) of each beam in the region of all the multiple beams 20 and themaximum value of the dose correction coefficient D_(J(k)). Therefore, ispossible to make the maximum dose modulation amount smaller by theamount of the product difference.

In the shot cycle calculating step (S136), the shot cycle calculationunit 70 calculates a shot cycle time based on the region having beenset.

FIGS. 15A and 15B show examples of a time chart according to the firstembodiment. FIG. 15A shows an example of a data transfer time and a shottime in the high-speed writing mode using all the beams of the multiplebeams 20 implemented to be emittable by the writing mechanism 150. Inthe high-speed writing mode, it is necessary to transfer ON/OFF controlsignals (shot data) for all the beams of the multiple beams 20implemented to be emittable by the writing mechanism 150. Moreover, withrespect to each shot time, the maximum irradiation time corresponding tothe maximum dose modulated based on the maximum dose modulation amountis needed. A shot cycle (time) is set in consideration of the maximumirradiation time and the data transfer time for each shot. FIG. 15Ashows the case where the data transfer time is longer than the maximumirradiation time. In that case, the shot cycle is determined based onthe data transfer time. On the other hand, in the high-accuracy writingmode, as described above, by restricting the use region to the centra1portion, and making the ON/OFF control signal (shot data) for each shotof the beam array of effective columns including the use region standready in each of the shift register 40 a and 40 b for the beam array(the third beam array) of ineffective columns on the peripheral side, itis possible to transfer the shot data by clock signals performed smallernumber of times compared to those performed in the case emitting all thebeams mounted. Therefore, the transfer time can be shortened as shown inFIG. 15B. Further, as described above, since the use region isrestricted to the central portion, the product between the maximum valueof the dose correction coefficient D_(m) of each beam in the centralportion and the maximum value of the dose correction coefficient D_(J)can be made smaller than the product between the maximum value of thedose correction coefficient D_(m) of each beam in the region of all themultiple beams 20 and the maximum value of the dose correctioncoefficient D_(J(k)). Therefore, it is possible to make the maximum dosemodulation amount smaller by the amount of the product difference.Accordingly, as shown in FIG. 15B, the maximum irradiation timecorresponding to the maximum dose modulated based on the maximum dosemodulation amount can be shortened. Thus, as shown in FIG. 15B, it ispossible to make the shot cycle (time) shorter than that in the case ofwriting using all of the multiple beams 20.

In the shot cycle setting step (S138), the writing control unit 78 setsthe calculated shot cycle (time). Since, in the high-accuracy writingmode, the number of beams is smaller than that used in the high-speedwriting mode using all of the multiple beams 20 implemented to beemittable by the writing mechanism 150, the region which can be writtenat a time is smaller by the amount of difference between the number ofthe beams. Therefore, if the writing processing is performed in the sameshot cycle as that of the high-speed writing mode, the writing timebecome longer in accordance with the reduction of the number of beams.However, according to the first embodiment, by recalculating the shotcycle used in the case of restricting the use region to the centralportion of the region of all the multiple beams 20 implemented to beemittable by the writing mechanism 150, the shot cycle can be shortenedand degradation of the throughput can be inhibited.

In the lens control value changing step (S140), the lens control unit 74out to the lens control circuit 137, a lens control value for excitingthe reducing lens 205 and the objective lens 207, which are used torefract the multiple beams 20, employed in the case of using the beamarray in the use range having been set. The lens control circuit 137switches (changes) the lens control value currently set to the one newlyinput.

FIG. 16 shows an example of a lens control value table according to thefirst embodiment. In FIG. 16 , the lens control value table (lens table)defines the lens control value related to the number of beams to be usedin the multiple beams 20. In the case of FIG. 16 , it is defined thatwhen the number of beams is one, the lens control value 1 of thereducing lens 205 is F11, and the lens control value 2 of the objectivelens 207 is F21. Further, it is defined that when the number of beams istwo, the lens control value 1 of the reducing lens 205 is F12, and thelens control value 2 of the objective lens 207 is F22. That is, it isdefined that when the number of beams is N, the lens control value 1 ofthe reducing lens 205 is F1n, and the lens control value 2 of theobjective lens 207 is F2n. The lens control value table is input inadvance from the outside of the writing apparatus 100, and stored in thestorage device 144. The focusing position of each electromagnetic lensvaries depending on the amount of beam current. Therefore, if the samecontrolling of the electromagnetic lens as that performed in thehigh-speed writing mode is performed, since the beam current amount hasbecome small in accordance with reduction of the number of beams, thefocusing position of each electromagnetic lens may vary. Then, accordingto the first embodiment, referring to the lens control value table, thelens control unit 74 reads each lens control value in accordance withthe number of beams of the beam array in the use range having been set.Then, the lens control unit 74 outputs the read lens control value tothe lens control circuit 137. The lens control circuit 137 changes(switches) the lens control values to the ones obtained with referenceto the table and based on the number of beams of the beam array in theregion having been set. Thereby, deviation of the focus position due torestriction of the beam array region can be corrected.

In the focus checking step (S142), it is checked whether the focusposition of the beam array focused (converged) by the objective lens 207which is excited corresponding to the changed lens control value matchesthe height position of the surface of the target object 101.

In the determining step (S144), the lens control unit 74 determineswhether the focus position based on the set (changed) lens control valueis within an acceptable value (that is, whether readjustment is neededor not). When readjustment is unnecessary, it proceeds to the datatransfer step (S150). When readjustment is needed, it proceeds to thelens control value correcting step (S146).

In the lens control value correcting step (S146), the lens control unit74 corrects the set (changed) lens control value, and outputs it to thelens control circuit 137. The lens control circuit 137 changes the satvalue to the corrected lens control value. For example, the lens controlvalue can be corrected by adding or subtracting a predetermined valueto/from the set (changed) lens control value. Then, it returns to thefocus checking step (S142), and repeats from the focus checking step(S142) to the lens control value correcting step (S146) untilreadjustment becomes unnecessary.

Thereby, lens controlling can be performed in accordance with the totalcurrent amount of the beams to be used. Therefore, focal deviationresulting from having changed the number of beams can be suppressed, andhigher writing accuracy can be acquired.

In the data transfer step (S150), the transfer processing unit 76transfers, in order of shot, ON/OFF control signals (shot data) for thebeam array (the second beam array) of effective columns whose number ofbeams is smaller than that of the multiple beams 20 (the first beamarray) implemented to be emittable by the writing mechanism 150.Specifically, based on the data transfer method having been set, thetransfer processing unit 76 transfers, in order of shot, n-bit controlsignals for controlling ON/OFF of multiple beams grouped per half on thecentral portion side in the left half of each row of the multiple beams,and n-bit control signals for controlling ON/OFF of multiple beamsgrouped per half on the central portion side in the right half of eachrow of the multiple beams. Then, the ON/OFF control signal for each shotis transferred to a desired register, and more specifically, ON/OFFcontrol signals for the first shot are transferred by clock signalsperformed the same times as those performed in the high-speed writingmode, and ON/OFF control signals for the second and subsequent shots aretransferred by clock signals performed 1/2 times of those in thehigh-speed writing. With respect to a plurality of shift registers 40(registers) individually disposed for each beam of the multiple beams 20(the first beam array) implemented to be emittable by the writingmechanism 150, as shown in FIG. 12C, the transferred shot data for then-th shot is stored in each of the shift registers 40 (registers) forthe beam array (the second beam array) of effective columns, andsimultaneously, shot data for the (n+1)th shot is stored in each of theshift registers 40 (registers) for the beam array (the third beam array)of ineffective columns, which are other than the beam array (the secondbeam array) of effective columns in the first beam array. Since the useregion has been restricted to the central portion, the data amountitself can also be suppressed to about ½ of the data amount for all ofthe multiple beams 20 implemented to be emittable by the writingmechanism 150, thereby reducing the transfer time.

In the writing step (S152), the writing mechanism 150 writes a patternon the target object 101 with the beam array in the region of thecentral portion having been set, in the multiple beams 20 implemented tobe emittable by the writing mechanism 150. Moreover, the writingmechanism 150 writes a pattern on the target object 101 based on thecalculated shot cycle (time). Specifically, the writing mechanism 150writes a pattern on the target object 101 by performing shots of thebeam array (the second beam array) of effective columns including theuse region in the central portion. For example, the writing mechanism150 writes a pattern on the target object 101 by performing the n-thshot of the beam array (the second beam array) of effective columns. Asdescribed above, irradiation time data of beam OFF (irradiation timezero) is always generated for the foe arc array of 2×4 beams locatedupper part (in the y direction) of the use region, and the beam array of2×4 beams located lower part (in the y direction) of the use region.Therefore, the beam OFF condition is maintained. Operations of thewriting mechanism 150 and the method of writing are the same as thosedescribed above except that, due to the restriction of the use region,the size of the irradiation region 34 has become smaller, the beam arrayto be used is restricted, the shot cycle has become shorter, and thelens control value has been changed.

Thus, when the n-th shot of the beam array (the second beam array) ofeffective columns including the use region in the central portion iscompleted, in the data transfer step (S150), shot data for the (n+1)thshot is shifted from each of the shift registers 40 (registers) for thebeam array (the third beam array) of ineffective columns to each of theshift registers 40 (registers) for the beam array (the second beamarray) of effective columns. Then, receiving a read signal and a shotsignal from the deflection control circuit 130, the writing mechanism150 writes a pattern on the target object 101 by performing the (n+1)thshot of the beam array (the second beam array) of effective columnsincluding the use region of the central portion.

FIG. 17 shows an example of a relation between a total beam currentamount and the number of times of shots according to the firstembodiment. In the high-speed writing mode, since all of the multiplebeams 20 implemented to fee emittable by the writing mechanism 150 areused, the total beam current amount of one shot is large, which givesinfluence such as blurring due to the Coulomb effect. In contrast, inthe high-accuracy writing mode, since the use region is restricted tothe beam array in the region of the central portion, although the numberof times of shots for writing the same area increases, it is possible tomake the total beam current amount of one shot small, and the influencesuch as blurring due to the Coulomb effect can be inhibited. In theexample of FIG. 17 , since the use region is restricted such that thebeam array of 8×8 beams is restricted to 1/4, that is the beam array of4×4 beams, the number of times of shots for writing the same areaincreases four times.

As described above, according to the first embodiment, the high-speedwriting mode having a high throughput and the high-accuracy writing modesuppressing writing accuracy degradation due to the Coulomb effect canbe selectively used. Moreover, according to the first embodiment,writing accuracy degradation due to the Coulomb effect can be inhibitedwhile suppressing degradation the throughput.

Second Embodiment

Although the first embodiment describes the case where the counter 44 ismounted in the blanking aperture array mechanism 204, and theirradiation time of an individual beam is controlled by the counter 44of the individual blanking mechanism 47 in the blanking aperture arraymechanism 204, it is not limited thereto. A second embodiment describesthe case where the irradiation time of an individual beam is controlledby a common blanking mechanism

FIG. 18 is a conceptual diagram shewing a configuration of a writingapparatus according to the second embodiment. The contents of FIG. 18are the same as those of FIG. 1 except that a deflector 212 capable ofdeflecting all the multiple beams 20 is disposed in the electron opticalcolumn 102, and a logic circuit 131 is further included in the controlsystem 160. To the deflection control circuit 130, further the logiccircuit 131 is connected through a bus (not shown). The logic circuit131 is connected to the deflector 212.

The contents of the flowchart showing main steps of a writing methodaccording to the second embodiment is the same as those of FIG. 9 . Thecontents of the second embodiment is the same as those of the firstembodiment except what is particularly described below.

FIG. 19 is a schematic diagram showing the internal configuration of anindividual blanking control circuit and a common blanking controlcircuit according to the second embodiment. As shown in FIG. 19 , ineach control circuit 41 for individual blanking control disposed in theblanking aperture array mechanism 204 inside the body of the writingapparatus 100, there are arranged the shift register 40, the register43, the AND circuit 49, and the amplifier 46. Although, in the firstembodiment, individual blanking control for each beam is controlled by acontrol signal of several bits (e.g., ten bits), it is controlled in thesecond embodiment by a control signal of one bit, for example. That is,a one-bit control signal is input/output to/from the shift register 40and the register 43. Since the information amount of the control signalis small, the installation area of the control circuit 41 can be madesmall. In other words, even when the control circuit 41 is disposed inthe blanking aperture array mechanism 204 whose installation space issmall, more beams can be arranged at a smaller beam pitch.

Moreover, in the logic circuit 131 for common blanking, there aredisposed a register 50, a counter 52, and a common amplifier 54. Thesedo not simultaneously perform several different controls, and therefore,it is sufficient to use one circuit to perform ON/OFF control.Accordingly, even when a circuit for a high speed response is arranged,no problem occurs with respect to restriction on the installation spaceand the current to be used in the circuit. Therefore, the commonamplifier 54 operates at very high speed compared to the amplifier 46that, can be implemented in the blanking aperture array mechanism 204.The common amplifier 54 i s controlled by a 10-bit control signal, forexample. That is, for example, a 10-bit control signal is input/outputto/from the register 50 and the counter 52.

According to the second embodiment, blanking control of each beam isperformed using both the beam ON/OFF control by each control circuit 41for individual blanking control described above, and the beam ON/OFFcontrol by the logic circuit 131 for common blanking control thatcollectively performs blanking control of all the multiple beams.Moreover, according to the second embodiment, beam irradiationequivalent to one shot of a desired irradiation time is performed bydividing the maximum irradiation time of one shot into a plurality ofsub irradiation time periods, and combining a plurality of divided shotsbased on a plurality of sub irradiation time periods.

The contents of each step up to calculating the irradiation time of eachbeam in the irradiation time data generating step (S120) and theirradiation time data generating step (S130) are the same as those inthe first embodiment. Next, the shot data generation unit 60 processesan irradiation time indicated fey irradiation time data of each pixel 36into a plurality of divided shots. Specifically, it is processed asdescribed below.

FIG. 20 shows an example of digit numbers of a plurality of dividedshots and their corresponding irradiation time according to the secondembodiment. In the second embodiment, the maximum irradiation time Ttrof one shot is divided into n divided shots, which continuouslyirradiate the same position and each of which has a differentirradiation time. First, a gray-scale level value Ntr is defined bydividing the maximum irradiation time Ttr by a quantization unit A(gray-scale level resolution). For example, when n=10, it is dividedinto ten divided shots. When defining the gray-scale level value Ntr byan n binary digits, the quantization unit Δ should be set in advancesuch that the gray-scale level value Ntr is 1023 (Ntr=1023). By this,the maximum irradiation time Ttr is 1023Δ (Ttr=1023Δ). As shown in FIG.20 , each of the n divided shots has one of the irradiation time of2^(k′)Δ where the digit number k′ is one of 0 to 9 (k′=0 to 9). In otherwords, it has the irradiation time of one of 512Δ (=2⁹Δ), 256Δ (=2⁸Δ),128Δ (=2⁷Δ), 64Δ (=2⁶Δ), 32Δ (=2⁵Δ), 16Δ (=2⁴Δ), 8Δ (=2³Δ), 4Δ (=2²Δ),2Δ (=2 ¹Δ), and Δ (=2⁰Δ). That is, one shot of the beam array is dividedinto a divided shot having the irradiation time tk′ of 512Δ, a dividedshot having the irradiation, time tk′ of 256Δ, a divided shot having theirradiation time tk′ of 128Δ, a divided shot having the irradiation timetk′ of 64Δ, a divided shot having the irradiation time tk′ of 32Δ, adivided shot having the irradiation time tk′ of 16Δ, a divided shothaving the irradiation, time tk′ of 8Δ, a divided shot having theirradiation time tk′ of 4Δ, a divided shot having the irradiation timetk′ of 2Δ, and a divided shot having the irradiation time tk′ of Δ.

Therefore, an arbitrary irradiation time t(=NΔ) for irradiating eachpixel 36 can be defined by at least one combination of 512Δ (=2⁹Δ), 256Δ(=2⁸Δ), 128Δ (=2⁷Δ), 64Δ (=2⁶Δ), 32Δ (=2⁵Δ), 16Δ (=2⁴Δ), 8Δ (=2³Δ), 4Δ(=2²Δ), 2Δ (=2¹Δ), Δ (=2⁰Δ), and zero (0). For example, when there is ashot whose gray-scale level value N is N=50, since 50=2⁵+2⁴+2¹, it meansa combination of a divided shot having the irradiation time of 2⁵Δ, adivided shot having the irradiation time of 2⁴Δ, and a divided shothaving the irradiation time of 2¹Δ. when converting the gray-scale levelvalue N of an arbitrary irradiation time t for irradiating each pixel 36into a binary number, it is preferable to define to use a value of apossible larger number of digits.

The shot data generation unit 60 first calculates gray-scale level,value N data being integers by dividing the irradiation time t acquiredfor each pixel 36 by a quantization unit Δ (gray-scale levelresolution). The gray-scale level value N data is defined by agray-scale level value from 0 to 1023, for example. The quantizationunit Δ can be set variously, and, for example, it can be defined by 1 ns(nanosecond), etc. It is preferable that a value of 1 to 10 ns, forexample, is used as the quantization unit Δ. Here, as described above,the quantization unit Δ is set such that the gray-scale level value Ntrof the maximum irradiation time Ttr per shot is 1023. However, it is notlimited thereto. What is necessary is to set the quantization unit Δsuch that the gray-scale level value Ntr of the maximum irradiation timeTtr is 1023 or less.

Next, the shot data generation unit 60 determines, for each pixel 36,whether to make each divided shot of a plurality of divided shots beamON or beam OFF so that the total irradiation time of divided shots to bebeam ON may be a combination equivalent to a calculated beam irradiationtime. The irradiation time t acquired for each pixel 36 is defined bythe following equation (1) using an integer w_(k′) indicating eithervalue 0 or 1, and an irradiation time t_(k′) of the k′-th digit dividedshot in n divided shots. The divided shot whose integer w_(k′) is 1 canbe determined to be ON, and the divided shot whose integer w_(k′) is 0(zero) can be determined to be OFF.

$\begin{matrix}{t = {\sum\limits_{k^{\prime} = 0}^{n - 1}{w_{k^{\prime}}t_{k^{\prime}}}}} & (1)\end{matrix}$

For example, when N=700, it becomes w9=1, w8=0, w7=1, w6=0, w5=1, w4=1,w3=1, w2=1, w1=0, and w0=0. Therefore, it can be determined that thedivided shot of t9 is ON, the divided shot of t8 is OFF, the dividedshot of t7 is ON, the divided shot of t6 is OFF, the divided shot of t5is ON, the divided shot of t4 is ON, the divided shot of t3 is ON, thedivided shot of t2 is ON, the divided shot of t1 is OFF, and the dividedshot of t0 is OFF.

Next, the shot data generation unit 60 generates irradiation time arraydata of a divided shot for dividing one shot into a plurality of dividedshots which continuously irradiate the same position and each of whichhas a different irradiation time The shot data generation unit 60generates, for each pixel 36, irradiation time array data of a dividedshot to be applied to the pixel concerned. For example, when N=50, ═=2⁵+2⁴+2¹. Therefore, it becomes. “0000110010”. For example, when N=500,it becomes “0111110100”. When N=700, it becomes “1010111100”. Forexample when N=1023, it becomes “1111111111”.

In the data array processing step (S122) and the data array processingstep (S132), the array processing unit 62 processes irradiation timearray data in order of shot of each beam. Here, in accordance with thewriting sequence, the array processing unit 62 processes the order suchthat irradiation time array data of each pixel 36 is arranged in orderof pixel 36 to be shot by the multiple beams 20 sequentially. Also, withrespect to each divided shot in each shot, the array processing unit 62processes the order such that the ON/OFF control signals are arranged inorder of the shift registers 40 connected in series. The processedON/OFF control signal is stored in the storage device 142.

The contents of each of the remaining steps (the maximum dose modulationamount calculating step (S134), the shot cycle calculating step (S136),the shot cycle setting step (S138), the lens control value changing step(S140), the focus checking step (S142), the determining step (S144), thelens control value correcting step (S146), the data transfer step(S150), and the writing step (S152)) are the same as those in the firstembodiment. In the writing step (S152), the amplifier 46 for each beamswitches the electric potential to be applied to the control electrode24, in accordance th ON/OFF control signal stored in the register 43 forthe beam concerned. For example, if the ON/OFF control signal is “1”, anH electric potential (active potential) is input to the CMOS invertercircuit. By this, the output of the CMOS inverter circuit become aground potential, thereby becoming a beam ON condition. For example, ifthe ON/OFF control signal is “0 ”, an L electric potential is input tothe CMOS inverter circuit. By this, the output of the CMOS invertercircuit becomes a positive potential, thereby becoming a beam OFFcondition.

Moreover, at the same time, the deflection control circuit 130 outputs acommon ON/OFF control signal indicating the irradiation time of the k-thdivided shot to the register 50 of the logic circuit 131 of the commonblanking mechanism. Thereby, the common ON/OFF control signal for theX-th divided shot is read into the register 50 for common blanking.

Next, the deflection control circuit 130 outputs a shot signal to thecounter 52 of the logic circuit 131 in the common blanking mechanism.Thereby, the counter 44 for common blanking outputs a beam ON signal tothe common amplifier 54 only during the time indicated by the commonON/OFF control signal stored in the register 50 for common blanking.Specifically, the number of counts equivalent to the irradiation time ofthe current divided shot is counted at the clock cycle. Then, onlyduring the counting, the input of the CMOS inverter circuit (not shown)is made to be H (active). After the time indicated by the common ON/OFFcontrol signal has passed, a beam OFF signal is output to the commonamplifier 54. Specifically, after completing the counting, the input ofthe CMOS inverter circuit is made to be L.

Here, for the k-th divided shot, a deflection electric potential forbeam ON or beam OFF has already been applied to the control electrode 24from each amplifier 46, in accordance with the ON/OFF control signal. Insuch a state, the deflector 212 for common blanking controls theirradiation time of the current divided shot. That is, only while thecounter 44 is outputting a beam ON signal, all of the multiple beams 20can pass through the opening of the limiting aperture substrate 206without being blanking-deflected. In contrast, during the other timeperiod, all of the multiple beams 20 are blanking-deflected and blockedby the limiting aperture substrate 206. Thus, the irradiation time ofeach divided shot is controlled by the deflector 212 for commonblanking.

As described above, according to the second embodiment, even whenperforming irradiation of a desired irradiation time by combining aplurality of divided shots, it is possible to make the total currentamount per divided shot small end to suppress the influence due to theCoulomb effect, by restricting the use region to the beam array in theregion of the central portion, similarly to the first embodiment.Moreover, according to the second embodiment, by restricting the useregion to the central portion, similarly to the first embodiment, it ispossible to reduce the number of times of clock signals at the datatransfer time, to make the maximum irradiation time small, and toshorten the shot cycle. Moreover, similarly to the first embodiment,when reducing the number of beams by restricting the use region to thecentral portion, the lens control value is switched (changed) based onthe number of beams to be used.

As described above, according to the second embodiment, the high-speedwriting mode having a high throughput and the high-accuracy writing modesuppressing writing accuracy degradation due to the Coulomb effect canbe selectively used. Moreover, according to the second embodiment,writing accuracy degradation due to the Coulomb effect can be inhibitedwhile suppressing degradation the throughput even when performingirradiation of a desired irradiation time by combining a plurality ofdivided shots.

Third Embodiment

Although the first and second embodiments describe the case where thebeam current amount is reduced by restricting the irradiation region ofthe beam array to be used to the central portion of the irradiationregion of all the multiple beams 20 implemented to be emittable by thewriting mechanism 150, the method for suppressing the Coulomb effect isnot limited thereto. A third embodiment describes the configuration inwhich the beam current amount is reduced by performing region divisionby dividing the irradiation region of all the multiple beams 20implemented to be emit table by the writing mechanism 150. The structureof the writing apparatus 100 of the third embodiment may be the same asthat of FIG. 1 .

FIG. 21 is a flowchart showing main steps of a writing method accordingto the third embodiment. The contents of FIG. 21 are the same as thoseof FIG. 9 except that the data generation method setting step (S110),the data transfer method setting step (S112), the irradiation time datagenerating step (S130), the data array processing step (S132), themaximum dose modulation amount calculating step (S134), the shot cyclecalculating step (S136), and the shot cycle setting step (S138) are notincluded.

The contents of the reference parameter setting step (S102), the beamcalibration step (S104), and the writing job registration step (S106)are the same as those of the first embodiment.

In the beam array region setting step (S108), the region setting unit 72(region dividing unit) divides the irradiation region of the multiplebeams 20 implemented to be emittable by the writing mechanism 150 into aplurality of regions to be set.

FIG. 22 shows an example of a method for region division according tothe third embodiment. FIG. 22 shows the case of 8×8 multiple beams 20implemented to be emittable by the writing mechanism 150. When using thehigh-speed writing mode, the region setting unit 72 sets the region ofall the multiple beams 20 implemented to be emittable by the writingmechanism 150, as an irradiation region (use region) of the beam arrayto be used. In the example of FIG. 22 , the region setting unit 72 setsthe region of all the 8×8 multiple beams 20. In contrast, in the case ofusing the high-accuracy writing mode, as shown in FIG. 22 , the regionsetting unit 72 divides the irradiation region of all the p×q multiplebeams 20 implemented to be emittable by the writing mechanism 150 intotwo groups (G1 and G2), and sets the region for each group. In theexample of FIG. 22 , they are divided into a group G1 of the beam arrayof 4×8 beams in the left half, and a group G2 of the beam array of 4×8beams in the right half. Thus, the use region of the beam array isdivided. Then, in each shot processing of the multiple beams 20, theshot timing is shifted for each group. Thereby, the total current amountper shot can be made small. As a result, it is possible to suppressdegradation of writing accuracy due to the Coulomb effect. In theexample of FIG. 22 , since the multiple beams 20 of 8×8 beams is dividedinto beam arrays each of 4×8 beams, the amount of current can be reducedto around 1/2 in a simple calculation.

The contents of the irradiation time data generating step (S120) and thedata array processing step (S122) are same as those of the firstembodiment. Specifically, the shot data generation unit 60 generates anON/OFF control signal (shot data) for each shot of all the multiplebeams 20 implemented to be emittable by the writing mechanism 150. Thearray processing unit 62 rearranges the ON/OFF control signal for eachpixel in order of shot and in order of beam transfer.

In the lens control value changing step (S140), the lens control unit 74outputs, to the lens control circuit 137, a lens control value forexciting the reducing lens 205 and the objective lens 207, which areused to refract the multiple beams 20, employed in the case of using thebeam attar in the use range having been set. The lens control circuit137 switches (changes) the lens control value currently set to the onenewly input.

Specifically, referring to the lens control value table shown in FIG. 16, the lens control unit 74 reads each lens control value in accordancewith the number of beams of the beam array in the use range having beenset. According to the third embodiment, since region dividing has beenperformed into a plurality of groups, the lens control value inaccordance with the number of beams per group may be read. Then, thelens control circuit 137 changes (switches) the lens control values tothe ones obtained with reference to the table and based on the number ofbeams of the beam array in the region having been set. Thereby,deviation of the focus position due to restriction of the beam arrayregion can be corrected.

In the focus checking step (S142), it is checked whether the focusposition of the beam array focused (converged) by the objective lens 207which is excited corresponding to the changed lens control value matchesthe height position of the surface of the target object 101.

In the determining step (S144), the lens control unit 74 determineswhether the focus position based on the set (changed) lens control valueis within an acceptable value (that is, whether readjustment is neededor not). When readjustment is unnecessary, it proceeds to the datatransfer step (S150). When readjustment is needed, it proceeds to thelens control value correcting step (S146).

In the lens control value correcting step (S146), the lens control unit74 corrects the set (changed) lens control value, and outputs it to thelens control circuit 137. The lens control circuit 137 changes the setvalue to the corrected lens control value. For example, the lens controlvalue can be corrected by adding or subtracting a predetermined valueto/from the set (changed) lens control value. Then, it returns to thefocus checking step (S142), and repeats from the focus checking step(S142) to the lens control value correcting step (S146) untilreadjustment becomes unnecessary.

Thereby, lens controlling can be performed in accordance with the totalcurrent amount of the beams to be used. Therefore, focal deviationresulting from having changed the number of beams can be suppressed, andhigher writing accuracy can be acquired.

In the data transfer step (S150), for each shot, the transfer Processingunit 76 collectively transfer the ON/OFF control signals each for theshot concerned to the deflection control circuit 130. Then, for eachshot, the deflection control 130 collectively transmits the ON/OFFcontrol signals each for each beam of the multiple beams 20 to theblanking aperture array mechanism 204 (blanking apparatus).Specifically, for each shot, the deflection control circuit 130transmits, in a batch, the ON/OFF control signals to the controlcircuits 41 each for each beam of the blanking aperture array mechanism204. In other words, the ON/OFF control signals for a plurality ofgroups G and G2 are transferred collectively.

FIG. 23 is a schematic diagram showing the internal configuration of anindividual blanking control circuit according to the third embodiment.As shown, in FIG. 23 , in each control circuit 41 for individualblanking control disposed in the blanking aperture array mechanism 204inside the body of the writing apparatus 100, there are arranged theshift register 40, a buffer register 40, a buffer register 42, theregister 43, the counter 44, and the amplifier 46. According to thethird embodiment, individual blanking control for each beam is performedby an n-bit (e.g., ten bit) control signal. Here, for example, withrespect to the multiple beams 20 composed of p×q beams in an array(matrix), the shift registers 40 in the control circuits 41 for p beamsin the same row, for example, are connected in series. The example ofFIG. 23 shows the case where the shift registers 40 a, 40 b, 40 c, and40 d of the control circuits 41 for four beams in the same row areconnected in series. According to the third embodiment, the p×q multiplebeams 20 are grouped into a plurality of groups as shown in FIG. 22 .For example, they are grouped into two groups of G1 in the left half andG2 in the right half. The registers 43 (storage devices) in the samegroup are connected with each other. In other words, a plurality ofregisters 43 (storage devices) disposed inside the substrate 31 performgrouping of the multiple beams 20 into a plurality of groups. In theexample of FIG. 23 , with respect to control circuits 41 a to 41 d forfour beams arranged in the same row, where the shift registers 40 areconnected in series, the registers 43 a and 43 b are connected as thesame group G1, and the registers 43 c and 43 d are connected as the samegroup G2. Then, according to the third embodiment, a plurality ofregisters 43 (storage devices) arranged inside the substrate 31 outputON/OFF control signals, each stored in the register 43 concerned, to thecorresponding amplifiers 46 (switching circuits) while shifting thetiming for each group. Hereinafter, it will be described specifically.

FIG. 24 shows transfer processing of an ON/OFF control signal formultiple beams and operations in a control circuit according to thethird embodiment. As described above, according to the third embodiment,there are serially connected the shift registers 40 a, 40 b, 40 c, 40 d,and so on for p beams in the same row, for example, in the p×q multiplebeams 20 implemented to be emittable by the writing mechanism 150.Therefore, in one shot of the multiple beams, there are n-bit ON/OFFcontrol signals grouped for each row of the multiple beams, where thenumber of the grouped ON/OFF control signals is the number of beams ofeach column of the multiple beams. Such data group is transmitted in abatch to the blanking aperture array mechanism 204 from the deflectioncontrol circuit 130, for each shot of the multiple beams. For example,the data groups are collectively transferred in parallel. When theON/OFF control signals for the n-th shot are transmitted in a batch, theON/OFF control signal for each beam is stored in the corresponding shiftregister 40 by p clock signals, for example. The example of FIG. 24shows the case where the ON/OFF control signals for the fifth shot arecollectively transmitted. In the case of FIG. 24 , the ON/OFF controlsignals for four beams are stored in the corresponding shift registers40 a, 40 b, 40 c, and 40 d by four clock signals. It should beunderstood that, as described in the first embodiment, with respect tothe multiple beams 20 composed of p×q beams, the shift registers 40 inthe control circuits 41 for the left half (first to p/2th beams in the xdirection) of p beams in the same row are connected in series from theperipheral side toward the center side (in the x direction), and theshift registers 40 in the control circuits 41 for the right half((p/2+1) th to pth beams in the x direction) of p beams in the xdirection and in the same row are connected in series from theperipheral side toward the center side (in the −x direction), forexample.

In the writing step (S152), the writing mechanism 150 writes a patternon the target object 101 by performing irradiation with the beam arrayin the region concerned, using electromagnetic lenses, such as thereducing lens 205 and the objective lens 207 whose lens control valuehas been changed based on the number of beams, while shifting theirradiation timing for each divided region (group). Specifically, itoperates as follows.

The ON/OFF control signal for the (k+1)th shot has been stored in abuffer register 45 a (buffer 1) for each beam at the time when theON/OFF control signals for the (k+2)th shot are being transmitted in abatch. Moreover, at the same time, the ON/OFF control signal for thek-th shot has been stored in a buffer register 42 a (buffer 2) for eachbeam In the case of FIG. 24 , the ON/OFF control signal for the fourthshot, being the last (previous, most recent) shot, has been stored inthe buffer register 45 a (buffer 1) for each beam at the time when theON/OFF control signals for the fifth shot are being transmitted in abatch. The ON/OFF control signal for the last-but-one shot, that is thethird shot, has been stored in the buffer register 42 a (buffer 2) foreach beam

While the ON/OFF control signals for the (k+2)th shot are beingtransmitted in a batch, a reset signal is output to each register 43from the deflection control circuit 130. Thereby, the ON/OFF controlsignals stored in the registers 43 for all the beams are eliminated.

Next, as the shot of G1, first, the deflection control circuit 130outputs a read 1 signal (load 1) of the group 1 to the registers 43 inthe group 1. Accordingly, the ON/OFF control signal for the k-th shotstored in the buffer register 42 a (buffer 2) is read into the register43 (register 1) of the group G1. On the other hand, since the registers43 (register 2) in the group G2 have been in a reset state, no ON/OFFcontrol signal for the shot is read. Therefore, in such a state, theON/OFF control signals for the k-th shot (the third shot in the exampleof FIG. 24 ) have been stored only in the registers 43 (register 1) ofthe group 1.

Next, the deflection control circuit 130 outputs first shot signals (forgroup G1) to the counters 44 of all the beams. Accordingly, the counter44 for each beam outputs a beam ON signal to the amplifier 46 onlyduring the time indicated by the ON/OFF control signal stored in theregister 43 for the beam concerned. Specifically, the number of countsequivalent to the irradiation time of the beam concerned indicated bythe ON/OFF control signal is counted at the clock cycle. Then, onlyduring the counting, the input of the CMOS inverter circuit (amplifier46) is made to be H (active) After the time indicated by the ON/OFFcontrol signal has passed, a beam OFF signal is output to the amplifier46, Specifically, after completing the counting, the input of the CMOSinverter circuit (amplifier 46) is made to be L. Here, since the ON/OFFcontrol signals for the k-th shot have been stored in the registers 43in the group G1, the counters 44 of the group G1 output beam ON signalsto the amplifiers 46 only during the time indicated by the ON/OFFcontrol signals. On the other hand, since the ON/OFF control signals forthe k-th shot have not been stored in the registers 43 in the group G2,the counters 44 of the group G2 output beam OFF signals to theamplifiers 46.

Therefore, the amplifier 46 of the group G1 makes the beam concernedpass through the opening of the limiting aperture substrate 206 withoutdeflecting it, by applying a ground potential to the control electrode24 only during the beam ON signal being input from the counter 44. Onthe other hand, since a beam ON signal is not input from the counter 44,the amplifier 46 of the group G2 blocks the beam concerned by thelimiting aperture substrate 206 by providing blanking deflection to thebeam concerned, by applying a positive electric potential (Vdd) to thecontrol electrode 24. Thereby, the k-th shot (shot k1) of the group G1is executed. With respect to the shot k1, the operation of the writingmechanism 150 is the same as that described above. However, here, onlythe beams of the group G1 are in a beam ON condition during theirradiation time having been set.

When the shots (shot 1) of the group G1 have been completed, while theON/OFF control signals for the (k+2)th shot, are transmitted in a batch,the deflection control circuit 130 outputs a reset signal to eachregister 43. Thereby, the ON/OFF control signals stored in the registers43 for all the beams are eliminated.

Next, as the shot of the group G2, first, the deflection control circuit130 outputs a read 2 signal (load 2) of the group G2 to the register 43of the group G2. Accordingly, the ON/OFF control signal for the k-thshot stored in the buffer register 42 a (buffer 2) is read into theregister 43 (register 2) of the group G2. On the other hand, since theregister 43 (register 1) of the group G1 has been in a reset state, theON/OFF control signal for the shot is not read. Therefore, in such astate, the ON/OFF control signals for the k-th shot (the third shot inthe example of FIG. 24 ) have been stored only in the registers 4 3(register 2) of the group G2.

Next, the deflection control circuit 130 outputs second shot signals(for group G2) to the counters 44 of all the beams. Accordingly, thecounter 44 for each beam outputs a beam ON signal to the amplifier 46only during the time indicated by the ON/OFF control signal stored inthe register 43 for the beam concerned. Since the ON/OFF control signalsfor the k-th shot have been stored in the registers 43 of the group G2,the counters 44 of the group G2 output beam ON signals to the amplifiers46 only during the time indicated by the OH/OFF control signals. On theother hand, since the ON/OFF control signals for the k-th shot are notstored in the registers 43 of the group G1, the counters 44 of the groupG1 output beam OFF signals to the amplifiers 46.

Therefore, the amplifier 46 of the group G2 makes the beam concernedpass through the opening of the limiting aperture substrate 206 withoutdeflecting it, by applying a ground potential to the control electrode24 only during the beam ON signal being input from the counter 44. Onthe other hand, since a beam ON signal is not input from the counter 44,the amplifier 46 of the group G1 blocks the beam concerned by thelimiting aperture substrate 206 by providing blanking deflection to thebeam concerned, by applying a positive electric potential (Vdd) to thecontrol electrode 24. Thereby, the k-th shot (shot k2) of the group G2is executed. The operation of the writing mechanism 150 is the same asthat described above. However, here, only the beams of the group G2 arein a beam ON condition during the irradiation time having been set.

As described above, a plurality of CMOS inverter circuits (amplifiers46) (an example of a switching circuit) for the multiple beams 20 arearranged inside the substrate 31, and individually connected to aplurality of registers 43, and each of the CMOS inverter circuitsswitches the electric potential of binary values, in accordance with theON/OFF control signal stored in the corresponding register 43. Then,during the ON/OFF control signal being transmitted, the CMOS invertercircuit continuously performs shots k1 and k2 of each group whileshifting the irradiation timing.

After the load 2 signal has been output and the ON/OFF control signalsfor the (k+2)th shot have been transmitted in a batch, the deflectioncontrol circuit 130 outputs buffer shift signals to the buffer registers45 and 42. By this, the ON/OFF control signals for the (k'02)th shotstored in the shift registers 40 are shifted to the buffer registers 45(buffer 1) each for each beam. Simultaneously, the ON/OFF controlsignals for the (k+1)th shot stored in the buffer registers 45 areshifted to the buffer registers 42 (buffer 2) each for each beam.

After the buffer shift signals have been output, ON/OFF control signalsfor the next (k+3)th shot are begun to be transmitted in a batch.Hereinafter, it is repeated similarly. Thus, storage devices, such asthe shift registers 40, the buffer registers 45, the buffer registers42, and the registers 43 are arranged inside the substrate 31, andtemporarily store the respective ON/OFF control signals for the multiplebeams 20 having been transmitted in a batch. Specifically, a pluralityof registers 43 (storage device) for the multiple beams 20 performgrouping of the multiple beams 20, and temporarily store the respectiveON/OFF control signals for the multiple beams 20 having been transmittedin a batch.

FIG. 24 illustrates the case where the current shot is performed whiledata transmission for the shot after the next one is being performedusing the two buffer registers 45 and 42. However, it is not limitedthereto. It is also preferable that the current shot is performed whiledata transmission for the next shot is being performed using the onebuffer register 42. In either case, shots being performed during datatransmission should be completed within the data transmission, whileshifting the shot timing for each group.

As described above, according to the third embodiment, it is notnecessary to divide data transmission for each group. Therefore,degradation of the throughput can be inhibited. Moreover, according tothe third embodiment, the ON/OFF control signal to be transmitted has noinformation to identify the group for which shot, timing should beshifted. Nonetheless, as shown in FIGS. 23 and 24 , by the circuit,configuration in the blanking aperture array mechanism 204, beamirradiation is performed while shifting the shot timing for each group,based on data having been transmitted as the same shot. Thereby, itbecomes unnecessary to define special information for the ON/OFF controlsignal. Moreover, according to the third embodiment, it is not necessaryto perform controlling while particularly identifying beam groups by thecontrol mechanism, such as the control computer 110 and the deflectioncontrol circuit 130.

FIG. 25 shows an example of a relation between the total beam currentamount and the number of times of shots according to the thirdembodiment. FIG. 25 shows the case where, in the high-speed writingmode, since all of the multiple beams 20 implemented to be emittable bythe writing mechanism 150 are used, irradiation is performed with ailthe multiple beams 20 at the same irradiation timing for each shot. Insuch a case, since the irradiation time differs depending on each beam,the influence of the Coulomb effect is greatest at the time of startingirradiation (exposure). On the other hand, since a part of beamirradiation has already been finished at around the maximum exposuretime, the Coulomb effect affects less. Accordingly, it is desirable todecrease the total current amount of all the beams at the time ofstarting irradiation (exposure) in order to inhibit the influence of theCoulomb effect. In the high-accuracy writing mode of the thirdembodiment, since the multiple beams 20 are grouped into a plurality ofgroups, and, at each shot time, the irradiation timing is shifted foreach group, the total beam current amount of the group concerned at thetime of staring irradiation (exposure) of each group can be made smallerthan that of all the beams at the staring time of simultaneousirradiation (exposure) of all the multiple beams 20. Therefore, theinfluence of Coulomb effect can be reduced. Moreover, since datatransmission of each shot can be completed by one-time transmission,degradation of the throughput due to increase of transmission time canbe avoided. In the high-speed writing mode, since all of the multiplebeams 20 implemented to be emittable by the writing mechanism 150 areused, the total beam current amount of one shot is large, which givesinfluence such as blurring due to the Coulomb effect. In contrast, inthe high-accuracy writing mode, since the beam array region is divided,although the number of times of shots for writing the same areaincreases, it is possible to make the total beam current amount of oneshot small, and the influence such as blurring due to the Coulomb effectcan be inhibited. In the example of FIG. 22 , since the use region isrestricted such that the beam array of 8×8 beams is divided into twobeam arrays each of 4×8 (½ of 8×8) beams, the number of times of shotsfor writing the same area increases twice.

FIGS. 26A and 26B show examples of a time chart according to the thirdembodiment and a comparative example. As a comparative example, FIG. 26Ashows an example of data transmission time and shot time in the case ofsimply dividing one shot into two shots of a group G1 shot and a groupG2 shot. As the third embodiment, FIG. 26B shows an example of datatransmission time and shot time in the case of collectively transmittingthe ON/OFF control signals (shot data) of the same shot, and performingirradiation while shifting the irradiation timing for each group. In thecomparative example, since one shot is simply divided into two shots, asshown in FIG. 26A, the exposure time simply becomes twice the one in thehigh-speed writing mode shown in FIG. 15A. On the other hand, in thehigh-accuracy writing mode according to the third embodiment, as shownin FIG. 26B, the shot cycle can be approximately half by collectivelytransmitting data and performing writing while shifting the irradiationtiming.

FIGS. 27A and 27B are conceptual diagrams showing another example of theinternal configuration of an individual blanking control circuitaccording to the third embodiment. The example described above, as shownin FIG. 27A, explains the case where grouping is performed by theregister 43 such as the register 43 G1 and the register 43 G2, but it isnot limited thereto. It is also preferable to group the counter 44 intothe counter 44 G1 and the counter 44 G2 as shown in FIG. 27B, and tooutput shot signals, such as a Shot 1 and a shot 2, to the counter 44 ina corresponding group.

As described above, according to the third embodiment, the total beamcurrent amount can be reduced without increasing the data transmissionamount. Therefore, it is possible to inhibit the Coulomb effect whileinhibiting throughput degradation of the multi-beam writing.Accordingly, so-called blurring and/or positional deviation of an imageof multiple beams due to the Coulomb effect can be avoided or reduced.Furthermore, focal deviation resulting from having changed the number ofbeams can be suppressed, and therefore, higher writing accuracy can beacquired.

Fourth Embodiment

Although the third embodiment describes the case where the counter 44 ismounted in the blanking aperture array mechanism 204, and theirradiation time of an individual beam is controlled by the counter 44in the individual blanking mechanism 47, it is not limited thereto. Afourth embodiment describes the case of controlling the irradiation timeof an individual beam by using a common blanking mechanism.

The configuration of a writing apparatus according to the fourthembodiment may be the same as that of FIG. 18 . The flowchart showingmain steps of a writing method according to the fourth embodiment is thesame as that of FIG. 21 . The contents of the fourth embodiment are thesame as those of the third embodiment except what is particularlydescribed below.

FIG. 28 is a schematic diagram showing the internal configuration of anindividual blanking control circuit and a common blanking controlcircuit according to the fourth embodiment. As shown in FIG. 28 , ineach control circuit 41 for individual blanking control disposed in theblanking aperture array mechanism 204 inside the body of the writingapparatus 100, there are arranged the shift register 40, the bufferregister 45, the buffer register 42, the register 43, and the amplifier46. Although, in the third embodiment, individual blanking control foreach beam is controlled by a control signal of several bits (e.g., tenbits), it is controlled in the fourth embodiment by a control signal ofone to three bits (e.g., one bit). That is, a one-bit control signal isinput/output to/from the shift register 40, the buffer register 45, thebuffer register 42, and the register 43. Since the information amount ofthe control signal is small, the installation area of the controlcircuit 41 can be made small. In other words, even when the controlcircuit 41 is disposed in the blanking aperture array mechanism 204whose installation space is small, more beams can be arranged at asmaller beam pitch.

Moreover, in the logic circuit 131 for common blanking, there aredisposed the register 50, the counter 52, and the common amplifier 54.These do not simultaneously perform several different controls, andtherefore, it is sufficient to use one circuit to perform ON/OFFcontrol. Accordingly, even when a circuit for a high speed response isarranged, no problem occurs with respect to restriction on theinstallation space and the current to be used in the circuit. Therefore,the common amplifier 54 operates at very high speed compared to theamplifier 46 that can be implemented in the blanking aperture arraymechanism 204. The common amplifier 54 is controlled by a ten-bitcontrol signal, for example. That is, for example, a ten-bit controlsignal is input/output to/from the register 50 and the counter 52.

According to the fourth embodiment, similarly to the second embodiment,blanking control of each beam is performed using both the beam ON/OFFcontrol by each control circuit 41 for individual blanking controldescribed above, and the beam ON/OFF control by the logic circuit 131for common blanking control that collectively performs blanking controlof all the multiple beams. Moreover, according to the fourth embodiment,similarly to the second embodiment, beam irradiation equivalent to oneshot of a desired irradiation time is performed by dividing the maximumirradiation time of one shot into a plurality of sub irradiation timeperiods, and combining a plurality of divided shots based on a pluralityof sub irradiation time periods.

The contents of each step up to calculating the irradiation time of eachbeam in the irradiation time data generating step (S120) are the same asthose in the third embodiment. Next, similarly to the second embodiment,the shot data generation unit 60 processes an irradiation time indicatedby irradiation time data of each pixel 36 a plurality of divided shots.The maximum irradiation time Ttr of one shot is divided into n dividedshots, which continuously irradiate the same position and each of whichhas a different irradiation time. First, a gray-scale level value Ntr isdefined by dividing the maximum irradiation time Ttr by a quantizationunit Δ (gray-scale level resolution). For example, when n=10, it isdivided into ten divided shots. When defining the gray-scale level valueNtr by an n binary digits, the quantization unit Δ should be set inadvance such that the gray-scale level value Ntr is 1023 (Ntr=1023). Bythis, as shown in FIG. 20 , each of the n divided shots has one of theirradiation time of 2 ^(k′)Δ where the digit number k′ is one of 0 to 9(k′=0 to 9). That is, one shot of the beam array is divided into adivided shot having the irradiation time tk′ of 512Δ, a divided shothaving the irradiation time tk′ of 256Δ, a divided shot having theirradiation time tk′ of 128Δ, a divided shot having the irradiation timetk′ of 64Δ, a divided shot having the irradiation time tk′ of 32Δ, adivided shot having the irradiation time tk′ of 16Δ, a divided shothaving the irradiation time tk′ of 8Δ, a divided shot having theirradiation time tk′ of 4Δ, a divided shot having the irradiation timetk′ of 2Δ, and a divided shot having the irradiation time tk′ of Δ.

Therefore, an arbitrary irradiation time t(=NΔ) for irradiating eachpixel 36 can be defined by at least one combination of 512Δ (=2⁹Δ), 256Δ(=2⁸Δ), 128Δ (=2⁷Δ), 64Δ (=2⁶Δ), 32Δ (=2⁵Δ), 16Δ (=2⁴Δ), 8Δ (=2³Δ), 4Δ(=2²Δ), 2Δ (=2¹≠), Δ (=2⁰Δ), and zero (0). When converting thegray-scale level value N of an arbitrary irradiation time t forirradiating each pixel 36 into a binary number, it is preferable todefine to use a value of a possible larger number of digits.

The shot data generation unit 60 first calculates gray-scale level valueN data being integers by dividing the irradiation time t acquired foreach pixel 36 by a quantization unit A (gray-scale level resolution).The gray-scale level value N data is defined by s gray-scale level valuefrom 0 to 1023, for example. The quantization unit A can be setvariously, and, for example, it can be defined by 1 ns (nanosecond),etc. It is preferable that a value of 1 to 10 ns, for example, is usedas the quantization unit Δ.

Next, the shot data generation unit 60 determines, for each pixel 36,whether to make each divided shot of a plurality of divided shots beamON or beam OFF so that the total irradiation time of divided shots to bebeam ON may be a combination equivalent to a calculated beam irradiationtime. The irradiation time t acquired for each pixel 36 is defined bythe equation (1) described above, using an integer w_(5′) indicatingeither value 0 or 1, and an irradiation time t_(k′) of the k′-th digitdivided shot in n divided shots. The divided shot whose integer w_(k′)is 1 can be determined to be ON, and the divided shot whose integer isw_(k′) is 0 (zero) can be determined to be OFF.

Next, the shot data generation unit 60 generates irradiation time arraydata of a divided shot for dividing one shot into a plurality of dividedshots which continuously irradiate the same position and each of whichhas a different irradiation time. The shot data generation unit 60generates, for each pixel 36, irradiation time array data of a dividedshot to be applied to the pixel concerned.

In the data array processing step (S122), the array processing unit 62processes irradiation time array data in order of shot of each beam.Here, in accordance with the writing sequence, the array processing unit62 processes the order such that irradiation time array data of eachpixel 36 is arranged in order of pixel 36 to be shot by the multiplebeams 20 sequentially. Also, with respect to each divided shot; in eachshot, the array processing unit 62 processes the order such that theON/OFF control signals are arranged in order of the shift registers 40connected in series. The processed ON/OFF control signal is stored inthe storage device 142.

The contents of each of the lens control value changing step (S140), thefocus checking step (S142), the determining step (S144), and the lenscontrol value correcting step (S146) are the same as those of the thirdembodiment.

In the data transfer step (S150), for each divided shot, the transferprocessing unit 76 collectively transfers the ON/OFF control signalseach for the divided shot concerned to the deflection control circuit130. Then, for each divided shot, the deflection control circuit 130collectively transmits the ON/OFF control signals each for each beam ofthe multiple beams 20 to the blanking aperture array mechanism 204(blanking apparatus). Specifically, for each divided shot, thedeflection control circuit 130 transmits, in a batch, the ON/OFF controlsignals to the control circuits 41 each for each beam of the blankingaperture array mechanism 204. In other words, the ON/OFF control signalsfor a plurality of groups G1 and G2 are transferred collectively.

In the writing step (S152), the writing mechanism 150 irradiates thewriting substrate 101 with the multiple beams 20 in accordance with theON/OFF control signal of each beam having been transferred in a batch,while changing the irradiation timing for each group obtained bygrouping the multiple beams 20 into a plurality of groups by a pluralityof individual blanking mechanisms 47 mounted in the blanking aperturearray mechanism 204. Specifically, it operates as follows:

According to the fourth embodiment, individual blanking control for eachbeam is performed by an n-bit (e.g., one bit) control signal. In thefourth embodiment, p×q multiple beams 20 are grouped into a plurality ofgroups as shown in FIG. 22 . For example, they are grouped into twogroups of G1 in the left half and G2 in the right half. The registers 43(storage devices) in the same group are connected with each other. Inother words, a plurality of registers 43 (storage devices) disposedinside the substrate 31 perform grouping of the multiple beams 20 into aplurality of groups. In the example of FIG. 28 , with respect to controlcircuits 41 a to 41 d for four beams arranged in the same row, where theshift registers 40 are connected in series, the registers 43 a and 43 bare connected as the same group G1, and the registers 43 c and 43 d areconnected as the same group G2. Then, according to the fourthembodiment, a plurality of registers 43 (storage devices) arrangedinside the substrate 31 output ON/OFF control signals, each stored inthe register 43 concerned, to the corresponding amplifiers 46 (switchingcircuits) while shifting the timing for each group, hereinafter, it willbe described specifically.

FIG. 29 shows transfer processing of an CN/OFF control signal formultiple beams and operations in a control circuit according to thefourth embodiment. As described above, according to the fourthembodiment, there are serially connected the shift registers 40 a, 40 b,40 c, 40 d, and so on for p beams in the same row, for example, in thep×q multiple beams 20. Therefore, in one shot of the multiple beams,there are one bit ON/OFF control signals grouped for each row of themultiple beams, where the number of the grouped ON/OFF control signalsis the number of beams of each column of the multiple beams. Such datagroup is transmitted in a batch to the blanking aperture array mechanism204 from the deflection control circuit 130, for each divided shot ofthe multiple beams. For example, the data groups are collectivelytransferred in parallel. As shown in FIG. 29 , when the ON/OFF controlsignals for the (k+2)th divided shot are transmitted in a baton, theON/OFF control signal for each beam is stored in the corresponding shiftregister 40 by p clock signals, for example. The example of FIG. 29shows the case where the ON/OFF control signals for the fifth dividedshot (k′=fifth digit divided shot) are collectively transmitted. In thecase of FIG. 29 , the ON/OFF control signals for four beams are storedin the corresponding shift registers 40 a, 40 b, 40 c, and 40 d by fourclock signals.

The ON/OFF control signals for the (k+1)th divided shot have been storedin the buffer register 45 a (buffer 1) for each beam at the time whenthe ON/OFF control signals for the (k+2)th divided shot are beingtransmitted in a batch. Moreover, at the same time, the ON/OFF controlsignals for the k-th divided shot have been stored in the bufferregister 42 a (buffer 2) for each beam. In the case of. FIG. 29 , theON/OFF control signals for the fourth divided shot (k′=sixth digitdivided shot), being the last (previous, most recent) divided shot,haven been stored in the buffer register 45 a (buffer 1) for each beamat the time when the ON/OFF control signals for the fifth divided shot(k′=fifth digit divided shot) are being transmitted in a batch.

The ON/OFF control signals for the third divided shot (k′=seventh digitdivided shot), being the last-but-one divided shot, have been stored inthe buffer register 42 a (buffer 2) for each beam.

While the ON/OFF control signals for the (k+2)th divided. shot are beingtransmitted. in a batch, a reset signal is output to each is 43 andregister 50 from the deflection control circuit 130. Thereby, the ON/OFFcontrol signals stored in the registers 43 for all the beams areeliminated. Similarly, the ON/OFF control signals stored in theregisters 50 for common blanking are eliminated.

Next, firstly, the deflection control circuit 130 outputs a read 1signal (load 1) of the group 1 to the register of the group 1.Accordingly, the ON/OFF control signal for the k-th divided shot storedin the buffer register 42 a (buffer 2) is read into the register 43a(register 1) of the group 1. On the other hand, since the register 43 c(register 2) of the group 2 has been in a reset state, the ON/OFFcontrol signal for the divided shot is not read. Therefore, in such astate, the ON/OFF control signals for the k-th divided shot (the thirddivided shot in the example of FIG. 29 ) have been stored only in theregisters 43 (register 1) of the group 1. Thereby, the amplifier 46 foreach beam switches the electric potential to be applied to the controlelectrode 24, in accordance with the ON/OFF control signal stored in theregister 43 for the beam concerned. For example, if the ON/OFF controlsignal is “1” an H electric potential (active potential) is input to theCMOS inverter circuit. By this, the output of the CMOS inverter circuitbecomes a ground potential, thereby becoming a beam ON condition. Forexample, if the ON/OFF control signal is “0”, an L electric potential isinput to the CMOS inverter circuit. By this, the output of the CMOSinverter circuit becomes a positive potential, thereby becoming a beamOFF condition.

Moreover, at the same time, the deflection control circuit 130 outputs acommon ON/OFF control signal indicating the irradiation time of the k-thdivided shot to the register 50 of the logic circuit 131 of the commonblanking mechanism. Thereby, the common ON/OFF control signal for thek-th divided shot is read into the register 50 for common blanking.

Next, the deflection control circuit 130 outputs a first shot signal(for group 1) to the counter circuit 52 of the logic circuit 131 in thecommon blanking mechanism. Accordingly, the counter 44 for commonblanking outputs a beam ON signal to the common amplifier 54 only duringthe time indicated by the common ON/OFF control signal stored in theregister 50 for common blanking. Specifically, the number of countsequivalent to the irradiation time of the current divided shot iscounted at the clock cycle. Then, only during the counting, the input ofthe CMOS inverter circuit (not shown) is made to be H (active). Afterthe time indicated by the common ON/OFF control signal has passed, abeam OFF signal is output to the common amplifier 54. Specifically,after completing the counting, the input of the CMOS inverter circuit ismade to be L.

Here, for the k-th divided shot, the amplifier 46 for the beam of thegroup 1 has already applied a deflection electric potential for beam ONor beam OFF to the control electrode 24, in accordance with the ON/OFFcontrol signal. On the other hand, the amplifier 46 for the beam of thegroup 2 has already applied a deflection electric potential (positivepotential) for beam OFF to the control electrode 24. In such a state,the irradiation time of the current divided shot is controlled by thedeflector 212 for common blanking. That is, only while the counter 44 isoutputting a beam ON signal, ail the multiple beams 20 can pass throughthe opening of the limiting aperture substrate 206 without beingblanking-deflected. In contrast, during the other time period, all themultiple beams 20 are blanking-deflected and blocked by the limitingaperture substrate 206. Thereby, the k-th divided shot (shot k1) of thegroup 1 is executed.

When the divided shots (shot 1) of the group 1 have been completed, thedeflection control circuit 130 outputs a reset signal to each register43. By this, the ON/OFF control signals stored in the registers 43 forall the beams are eliminated.

Next, the deflection control circuit 130 outputs a read 2 signal (load2) of the group 2 to the register 43 of the group 2. Accordingly, theON/OFF control signal for the k-th divided shot stored in the bufferregister 42 c (buffer 2) is read into the register 43 c (register 2) ofthe group 2. On the other hand, since the registers 43 (register 1) ofthe group 1 have been in a reset state, the ON/OFF control signal forthe divided shot is not read. Therefore, in such a state, the ON/OFFcontrol signal for the k-th divided shot (the third shot, in the exampleof FIG. 29 ) has been stored only in the register 43 c (register 2) ofthe group 2. Thereby, the amplifier 46 for each beam switches theelectric potential to be applied to the control electrode 24, inaccordance with the ON/OFF control signal stored in the register 43 forthe beam concerned. For example, if the ON/OFF control signal is “1”, anH electric potential (active potential) is input to the CMOS invertercircuit. By this, the output of the CMOS inverter circuit becomes aground potential, thereby becoming a beam ON condition. For example, ifthe ON/OFF control signal is “0”, an L electric potential is input tothe CMOS inverter circuit. By this, the output of the CMOS invertercircuit becomes a positive potential, thereby becoming a beam OFFcondition.

Moreover, at the same time, the deflection control circuit 130 outputs acommon ON/OFF control signal indicating the irradiation time of the k-thdivided shot to the register 50 of the logic circuit 131 of the commonblanking mechanism. Thereby, the common ON/OFF control signal for thek-th divided shot is read into the register 50 for common blanking.

Next, the deflection control circuit 130 outputs a second shot signal(for group 2) to the counter circuit 52 of the logic circuit 131 in thecommon blanking mechanism. Accordingly, the counter 44 for commonblanking outputs a beam ON signal to the common amplifier 54 only duringthe time indicated by the common ON/OFF control signal stored in theregister 50 for common blanking. After the time indicated toy the commonON/OFF control signal has passed, a beam OFF signal is output to thecommon amplifier 54.

Here, for the k-th divided shot, the amplifier 46 for the beam of thegroup 2 has already applied a deflection electric potential for beam ONor beam OFF to the control electrode 24, in accordance with the ON/OFFcontrol signal. On the other hand, the amplifier 46 for the beam of thegroup 1 has already applied a deflection electric potential (positivepotential) for beam OFF to the control electrode 24. In such a state,the irradiation time of the current divided shot is controlled by thedeflector 212 for common blanking. That is, only while the counter 44 isoutputting a beam ON signal, all the multiple beams 20 can pass throughthe opening of the limiting aperture substrate 206 without beingblanking-deflected. In contrast, during the other time period, all themultiple beams 20 are blanking-deflected and blocked by the limitingaperture substrate 206. Thereby, the k-th divided shot (shot k2) of thegroup 2 is executed.

As described above, in the fourth embodiment, as in the thirdembodiment, a plurality of CMOS inverter circuits (amplifiers 46) (anexample of a switching circuit) for the multiple beams 20 are arrangedinside the substrate 31, individually connected to a plurality ofregisters 43, and each switches the electric potential of binary values,in accordance with the ON/OFF control signal stored in the correspondingregister 43. Then, during the ON/OFF control signal being transmitted,the CMOS inverter circuit continuously performs shots k1 and k2 of eachgroup while shifting the irradiation timing.

After the load 2 signal has been output and the ON/OFF control signalsfor the (k+2)th divided shot have been transmitted in a batch, thedeflection control circuit 130 outputs buffer shift signals to thebuffer registers 45 and 42. By this, the ON/OFF control signals for the(k+2)th divided shot stored in the shift registers 40 are shifted to thebuffer registers 45 (buffer 1) each for each beam. Simultaneously, theON/OFF control signals for the (k+1)th divided shot stored in the bufferregisters 45 are shifted to the buffer registers 42 (buffer 2) each foreach beam.

After the buffer shift signals have been output ON/OFF control signalsfor the next (k+3)th divided shot are begun to be transmitted in abatch. Hereinafter, it is repeated similarly. Thus, storage devices,such as the shift registers 40, the buffer registers 45, the bufferregisters 42, and the registers 43 are arranged inside the substrate 31,and temporarily store the respective ON/OFF control signals for themultiple beams 20 having been transmitted in a batch. Specifically, aplurality of registers 43 (storage device) for the multiple beams 20perform grouping of the multiple beams 20, and temporarily store therespective ON/OFF control signals for the multiple beams 20 having beentransmitted in a batch.

FIG. 29 illustrates the case where the current divided shot is performedwhile data transmission for the divided shot after the next one is beingperformed using the two buffer registers 45 and 42. However, it is notlimited thereto. It is also preferable that the current divided shot isperformed while data transmission for the next divided shot is beingperformed using the one buffer register 42.

As described above, according to the fourth embodiment, it is notnecessary to divide data transmission for each group. Therefore,degradation of the throughput can be inhibited. Moreover, according tothe fourth embodiment, the ON/OFF control signal to be transmitted hasno information to identify the group for which the timing of dividedshot should be shifted. Nonetheless, as shown in FIGS. 28 and 29 , bythe circuit configuration in the blanking aperture array mechanism 204,beam irradiation is performed while shifting the timing of divided shotfor each group, based on data having been transmitted as the samedivided shot. Thereby, it becomes unnecessary to define specialinformation for the ON/OFF control signal. Moreover, according to thefourth embodiment, it is not necessary to perform controlling whileparticularly identifying beam groups by the control mechanism, such asthe control computer 110 and the deflection control circuit 130.

FIG. 30 shows an example of a relation between data transmission timeand divided shot time according to the fourth embodiment. Since thecontrol circuit 41 of the individual blanking mechanism 47 is controlledby a 1-bit to 3-bit (e.g., 1-bit) control signal in the fourthembodiment, it is possible to shorten data transmission time of eachdivided shot. Therefore, as shown in FIG. 30 , with respect to a dividedshot whose irradiation time is longer (e.g., a divided shot having theirradiation time of 512Δ) in n divided shots, the case occurs wheredivided shots of all the groups cannot be completed within datatransmission time. On the other hand, with respect to a divided shotwhose irradiation time is shorter (e.g., a divided shot having theirradiation time of 128Δ or below), divided shots of three or moregroups (in the case of FIG. 30 , four or more groups) can be performedwithin data transmission time. Therefore, in the fourth embodiment,writing time takes longer by one divided shot, for example, than thetotal time of n divided shots. However, since it is sufficient for datatransmission to be performed once for each divided shot, delay time ofwriting time can be kept minimum.

As described above, according to the fourth embodiment, the total beamcurrent amount can be reduced without increasing the data transmissionamount. Therefore, it is possible to inhibit, the Coulomb effect whileinhibiting throughput degradation of the multi-beam writing.Accordingly, so-called blurring and/or positional deviation of an imageof multiple beams due to the Coulomb effect can be avoided or reduced.Furthermore, focal deviation resulting from having changed the number ofbeams can be suppressed, and therefore, higher writing accuracy can beacquired.

Embodiments have been explained referring to specific examples describedabove. However, the present invention is net limited to these specificexamples. Although the above examples describe the case where a shot ora plurality of divided shots is performed once for each pixel, it is notlimited thereto. Further, it is also preferable to perform multiplewriting of L passes. For example, a shot or a plurality of divided shotsmay be perforated for each pass of multiple (L) pass writing.

In negative resist, since a region irradiated by a beam remains as aresist pattern, not only a substantial pattern but also a region whereno substantial pattern exists is written. Therefore, preferably, thenumber of groups is set to be one for a region where no substantialpattern exists (where low dimensional accuracy is acceptable), and to betwo or more for a region where a substantial pattern exists (where highdimensional accuracy is required).

The number of beams of each group may not be the one obtained bydividing the number of all the beams by the number of groups. Forexample, in FIGS. 12A to 120 , the use region being the beam array of4×4 beams may be changed to the one of 6×6 beams. In that case, theregister for the beam array outside the use region cannot maintain allthe data of the beam array in the use region. However, data of the beamarray which cannot be maintained therein can be newly transmitted to theregister for the beam array in the use region, together with data d inthe register for the beam array outside the use region.

Moreover, in the examples described above, although the register is usedas a storage device, such as the buffer register 45, the buffer register42, and the register 43, it is not limited thereto. A memory can be usedinstead of the register.

While the apparatus configuration, control method, and the like notdirectly necessary for explaining the present invention are notdescribed, some or all of them can be appropriately selected and used ona case-by-case basis when needed. For example, although description ofthe configuration of the control unit for controlling the writingapparatus 100 is omitted, it should be understood that some or ail ofthe configurations of the control unit can be selected and usedappropriately when necessary.

In addition, any other multi-charged particle beam writing apparatus andmulti-charged particle beam writing method that include elements of thepresent invention and that can be appropriately modified by thoseskilled in the art are included within the scope of the presentinvention.

Additional advantages and modification will readily occur to thoseskilled in the art. Therefore, the invention in its broader aspects isnot limited to the specific details and representative embodiments shownand described herein. Accordingly, various modifications may be madewithout departing from the spirit or scope of the general inventiveconcept as defined by the appended claims and their equivalents.

What is claimed is:
 1. A multi-charged particle beam writing apparatuscomprising: a shot, data generation circuit, provided relating to afirst beam array of charged particle beams implemented to be emit tableby a multiple beam irradiation mechanism, configured to generate shotdata for a second beam array whose number of beams is smaller than thatof the first beam array implemented; a transfer circuit configured totransfer, in order of shot, the shot data for the second beam arraywhose number of beams is smaller than that of the first beam arrayimplemented; a plurality of registers, each arranged for a correspondingbeam of the first beam array, each configured to store shot data of thecorresponding beam; and a writing mechanism that includes the multiplebeam irradiation mechanism, configured to write a pattern on a targetobject by performing shots of the second beam array, wherein eachregister of registers, in the plurality of registers, for the secondbeam array stores shot data for an n-th shot of the second beam array,and simultaneously, each register of registers, in the plurality ofregisters, for a third beam array, which is other than the second beamarray in the first beam array, stores at least a part of shot data foran (n+1)th shot of the second beam array, and in a case of the n-th shothaving been completed, the shot data for the (n+1)th shot is shifted atleast from the each register for the third beam array to the eachregister for the second beam array.
 2. The apparatus according to claim1, wherein irradiation time data of beam OFF is always generated asirradiation time data of partial beams in the second beam array.
 3. Theapparatus according to claim 1, wherein the second beam array iscomposed of a plurality of beam columns in a central portion of thefirst been array, and irradiation time data of beam OFF is alwaysgenerated as irradiation time data of beams located on both end side ofeach beam column of the plurality of beam columns.
 4. A multi-chargedparticle beam writing apparatus comprising: a region dividing circuitconfigured to divide an irradiation region for all of multiple beams ofcharged particle beams implemented to be emittable by a multiple beamirradiation mechanism into a plurality of regions for a plurality ofmultiple beam groups each which includes a plurality of multiple beamsin the all of multiple beams of charged particle beams; a lens controlcircuit configured to change a lens control value of an electromagneticlens for refracting the multiple beams, based on a number of beams in adivided region of the plurality of region for the plurality of Multiplebeam groups each which includes the plurality of multiple beams in theall of multiple beams of charged particle beams; and a writing mechanismthat includes the multiple beam irradiation mechanism and theelectromagnetic lens, configured to write a pattern on a target objectby performing irradiation with a beam array in a divided region, usingthe electromagnetic lens whose lens control value has been changed basedon the number of beams, while shifting an irradiation timing for eachdivided region.
 5. A multi-charged particle beam writing methodcomprising: generating, relating to a first beam array of chargedparticle beams implemented to be emittable by a multiple beamirradiation mechanism, shot data for a second beam array whose number ofbeam is smaller than that of the first beam array implemented to emitcharged particle beams by the multiple beam irradiation mechanism;transferring, in order of shot, the shot data for the second beam arraywhose number of beams is smaller than that of the first beam arrayimplemented; storing shot data for an n-th shot having been transferredin each register of registers for the second beam array in a pluralityof registers each arranged for a corresponding beam of the first beamarray, and simultaneously, storing at least a part of shot data for an(n+1)th shot in each register of register in the plurality of registers,for a third beam array which is other than the second beam array in thefirst beam array; writing a pattern on a target object by performing then-th shot of the second beam array; and shifting, in a case of the n-thshot having been completed, the shot data for the (n+1)th shot at leastfrom the each register for the third beam array to the each register forthe second beam array.